The negative capacitance effect on the C-V measurement of ultra thin gate dielectrics induced by the stray capacitance of the measurement system

Abstract

This paper describes how thin film capacitance nieasurements helow 2nnr are affected hv an anomalous "h'egative Capacitance Efect" induced by parasitic components that originate /rom the wafer chuck. This inductive effect is observed even though appropriate calihration is executed at the tip.7 oJthe probe needle to remove lhe residual induclance /rom the measurement .system. We explain the mechanism of the "Negative Capacitance Effect" theoreticallv and demonstrate il experinrentally. And we propose a new nrethodolagv for on-wafer C-1' measuremenl.7 that con reduce this induclive effect that originates from sy.vtem parasitics while at the same time expanding the practical frequency range oJmeasurement la IOOMHz. INTRODUCTIOXIn the efforr to increase the performance of modem semiconductor integrated circuits through the scaling of uansistor dimensions a number of problems have been

Effects of Stray Capacitance to Ground in Bipolar Material Impedance Measurements Based on Direct-Contact Electrodes

“…C g depends on the volume of the material sample and its distance to ground. Some reported values are 10 pF for measurements in sapphire [12], 100 pF for measurements in semiconductors [13], and from 100 pF to 4 nF for measurements in the human body [25].…”

“…This residual inductance is used in metrology to compensate for the parallel stray capacitance of resistor standards [16]. Inductive loops in Cole-Cole diagrams [12] and negative capacitances [13] may have similar causes but, to the best of our knowledge, no detailed analysis of these problems is available.…”

“…Bipolar impedance measurements with direct-contact electrodes are used, for example, to determine the electrical conductivity of liquids, ionic water solutions [6], [7], or biologic solutions [8]; in dielectric spectroscopy of liquids, ionic water solutions [4], or biological cell suspensions [9]; for bioimpedance measurement in food processing [3], meat curing processes, meat or fish composition (fat and water) analysis, and food freshness determination; for soil measurements [10], soil moisture measurements [11], sapphire [12], or semiconductor [13] impedance measurements and other. The measurement target is normally the volume (bulk) impedance to determine the electrical properties (conductivity and permittivity) of the material.…”

Precise and Simple Methods for Detection of Initial Defects in 1.2 nm Gate Dielectrics Based on Nonlinear Conductions

“…EOT were evaluated from high frequency C-V measurements [31,32]. I g -V g measurements were conducted on condition that V d = V s = 0 V and the body was floating.…”

Practical Considerations for Measurements of Test Structures for Dielectric Characterization

“…6). The insulator between the wafer and the chuck reduces the complicated coupling between the wafer chuck and the ground, and results in improved measurements at higher frequencies [5].…”