The microstructural evolution of ultrananocrystalline diamond films due to P ion implantation and annealing process-dosage effect

Lin, Shaw‐Tao; Yeh, Chien-Jui; Dong, Chung‐Li; Niu, Huan; Kurian, Joji; Leou, Keh-Chyang; Lin, I‐Nan

doi:10.1016/j.diamond.2014.10.007

Cited by 8 publications

(9 citation statements)

References 30 publications

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“…High‐resolution image of tiny grains showing identical features as in Figure C was captured from another location of the film, which is shown in Figure S4. The gap between the two tiny grains, which were developed in structure of smooth elements, labelled by (2) in Figure S4 indicating a canal‐like channel and referred to “graphitic filament.” In the deposition chamber, travelling photons of suitable wavelength further shape structures of smooth elements of such tiny grains by means of aligning states of perturbed (misaligned) electrons of their elongated atoms resulting into provide uniform inter‐state electron gap for propagation of photons having characteristic of current.…”

Section: Resultsmentioning

confidence: 99%

“…Improvement in the conductivity but not EFE of P-ions incorporated-UNCD films was due to the transportation of electrons crossing interface [33]. Transportation of electrons is the prime reason for enhanced conductivity and field emission of doped films [34].…”

Section: Introductionmentioning

confidence: 97%

“…In all those studies and many others, factors related to performance of UNCD/NCD films are linked with the tiny grains of UNCD/NCD films. Improvement in the conductivity but not EFE of P‐ions incorporated‐UNCD films was due to the transportation of electrons crossing interface . Transportation of electrons is the prime reason for enhanced conductivity and field emission of doped films …”

Section: Introductionmentioning

confidence: 99%

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Phase transitions and critical phenomena of tiny grains carbon films synthesized in microwave‐based vapor deposition system

Ali

Lin

2018

Surface & Interface Analysis

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Different peak trends of tiny grains carbon film have been observed under the investigations of the Raman spectroscopy and energy loss spectroscopy. Carbon films known in nanocrystalline and ultrananocrystalline diamond films are synthesized by employing microwave-based vapor deposition system. Carbon atoms exhibit several state behaviors depending on the incurred positions of their electrons. Different morphology of tiny grains under different chamber pressure is related to different rate of arriving typical energies at/near substrate surface. Those tiny grains of carbon film, which evolved in graphitic state atoms are converted to structure of smooth elements where elongation of atoms of one-dimensional arrays is as per exerting surface format forces along opposite poles from their centers. Such tiny grains in the film are the cause of v 1 peak under the investigation of the Raman spectrum because of the enhanced propagation of input laser signals through channelized inter-state electron gaps of elongated graphitic state atoms. Those tiny grains of carbon film, which evolved in fullerene state are the cause of v 2 peak. The tiny grains related to v 1 peak possess a low intensity as compared with the ones which comprised atoms having state behaviors known in their exceptional hardness. Tiny grains representing v 1 peakin the Raman spectrum are also the cause of field emission characteristic of a carbon film. Different peak recordings were made for the Raman at defined positions indicating a different state of carbon atoms for a different phase of deposited tiny grains, which is in line to their energy loss spectroscopy.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

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Phase transitions and critical phenomena of tiny grains carbon films synthesized in microwave‐based vapor deposition system

Ali

Lin

2018

Surface & Interface Analysis

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“…The compressive stress released thereby leads to higher carrier concentration which also leads to lowering of the Hall mobility. In a different study on phosphorus implanted UNCD films, it was found that for an implantation dosage of >10 14 ions cm −2 succeeded by 30 min annealing of the samples at 800 • C decreased the electrical resistivity but surprisingly did not improve the FEE behavior [48,49]. At around 300 nm below the surface of the film where the implanted phosphorus ions reside the granular structure gets altered, the diamond grains coalesce and nanographitic clusters form channels for charge carrier transport.…”

Section: Ion Implantation Of Nitrogen and Other Non-metallic Species ...mentioning

confidence: 99%

Diamond-gold nanohybrids – an enhanced cathode material for field electron emitter applications

Sankaran

Kurian

Sundaravel

et al. 2020

J. Phys. D: Appl. Phys.

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This work aims to review the enhancement of electrical conductivity and field electron emission (FEE) properties of ultrananocrystalline diamond (UNCD) films as a function of gold ion implantation content. Au has been employed in UNCD films as an implanted species as well as an interlayer between diamond film and substrate. In the initial part of the review UNCD films are briefly introduced. The focus is on their FEE properties and multiple strategies employed for enhancing these properties using ion-implantation with the goal to obtain a better cathode material. A comparison of the characteristics of the UNCD films implanted with Au and other species after studying the modification of the microstructure and emission properties of the Au-implanted UNCD films is then provided. Subsequently, the use of a thin Au coating on silicon substrates covered by UNCD or hybrid granular structured diamond films is discussed. The Si diffusion through the Au-Si eutectic interface results in a SiC layer. This facilitates the nucleation of diamond clusters, thereby suppressing the development of the carbon layer which is amorphous and electrically resistive, resulting in improved FEE characteristics. Finally, in the third and final part, the combined effects of Au-ion implantation (including multi-energy Au ion implantation) and Au-interlayer is discussed. Based on the obtained results, the catalytic activity of gold for improving the electrical conductivity and the FEE properties of diamond films is highlighted.

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“…Ion implantation is a possible way to alter the electrical properties of materials through doping with a wide variety of dopant species. − By proper selection of the implantation energy and dose, the sp 2 /sp 3 ratio of diamond and the related carbon materials can be tailored. , The sp 2 -bonded carbon induced during the ion implantation and postannealing treatments of NCD films is the “conductivity promoter”, which enables the electrons to move freely inside the films. Lately, numerous reports affirmed that N, O, P, Cu, Au, and Pt ions implanted into diamond can considerably increase the electrical conductivity and FEE properties of diamond materials. − However, these ions are too large to substitutionally replace C atoms and act as electron donors. Lithium is also an interesting element to be implanted into diamond, as lithium is predicted to be able to occupy the interstitial sites of diamond as a potential shallow donor .…”

Section: Introductionmentioning

confidence: 99%

Microstructural Effect on the Enhancement of Field Electron Emission Properties of Nanocrystalline Diamond Films by Li-Ion Implantation and Annealing Processes

et al. 2018

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The impact of lithium-ion implantation and postannealing processes on improving the electrical conductivity and field electron emission (FEE) characteristics of nitrogen-doped nanocrystalline diamond (nNCD) films was observed to be distinctly different from those of undoped NCD (uNCD) films. A high-dose Li-ion implantation induced the formation of electron trap centers inside the diamond grains and amorphous carbon (a-C) phases in grain boundaries for both types of NCD films. Postannealing at 1000 °C healed the defects, eliminated the electron trap centers, and converted the a-C into nanographitic phases. The abundant nanographitic phases in the grain boundaries of the nNCD films as compared to the uNCD films made an interconnected path for effectual electron transport and consequently enhanced the FEE characteristics of nNCD films.

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The microstructural evolution of ultrananocrystalline diamond films due to P ion implantation and annealing process-dosage effect

Cited by 8 publications

References 30 publications

Phase transitions and critical phenomena of tiny grains carbon films synthesized in microwave‐based vapor deposition system

Phase transitions and critical phenomena of tiny grains carbon films synthesized in microwave‐based vapor deposition system

Diamond-gold nanohybrids – an enhanced cathode material for field electron emitter applications

Microstructural Effect on the Enhancement of Field Electron Emission Properties of Nanocrystalline Diamond Films by Li-Ion Implantation and Annealing Processes

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