2011
DOI: 10.1017/s1759078711000729
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The low-complexity RF MEMS switch at EADS: an overview

Abstract: This paper gives an overview of the low-complexity radio frequency microelectromechanical systems (RF MEMS) switch concept and technology of EADS Innovation Works in Germany. Starting in 2003, a capacitive switch concept, which is unique in several aspects, was developed to address specific needs in the aeronautic and space. Thermally grown silicon oxide as dielectric layer, the silicon substrate as actuation electrode, and a conductive zone realized by ion implantation make the EADS RF MEMS switch a very simp… Show more

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Cited by 6 publications
(3 citation statements)
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“…Various technologies appear suitable for constructing such a switching matrix, including semiconducting devices [16][17][18] , mechanical systems 19,20 , and superconducting logic 21 . For qubit technologies built from semiconductors 8,22 , field-effect based devices are ideally suited owing to their sub-nanosecond switching-speed, gigahertz transmission bandwidth, low dissipation, small footprint, cryogenic compatibility, and opportunity for integration with qubits.…”
Section: Switching Matrixmentioning
confidence: 99%
“…Various technologies appear suitable for constructing such a switching matrix, including semiconducting devices [16][17][18] , mechanical systems 19,20 , and superconducting logic 21 . For qubit technologies built from semiconductors 8,22 , field-effect based devices are ideally suited owing to their sub-nanosecond switching-speed, gigahertz transmission bandwidth, low dissipation, small footprint, cryogenic compatibility, and opportunity for integration with qubits.…”
Section: Switching Matrixmentioning
confidence: 99%
“…PIN diode switches which need to be continuously current-biased during operation are even less suitable for low-temperature applications. The quickly developing family of MEMS microwave switches [5,6] can provide very reliable switching with a minimal power dissipation and seems to be a good candidate for cryogenic microwave setups [7,8]. Similarly promising devices were recently demonstrated based on field-effect transistors [9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays, MEMS technology can be found in many applications such as micromirrors and microlens [123], high-quality tunable Radio Frequency (RF) filters [124,125], tunable antennas for mobile devices [126][127][128], RF switches and steerable antennas for radar and aerospace communications [129][130][131], medical applications like microfluidic cytometer (to measure various parameters of cells) [132], microneedles for drug delivery [133] or specific DNA sequences detection [134,135], automotive industry applications like airbags detonation, antilock braking system among others [136,137], and thermo-electric generators used for energy harvesting [138][139][140]. Traditionally, MEMS were fabricated on silicon substrates using integrated circuit batch-processing technologies such as surface and bulk silicon micromachining, lithography, etc., due to silicon availability and well-known material properties [144].…”
Section: Introductionmentioning
confidence: 99%