The Lateral Resolution of an Interference Microscope

Левин, Г. Г.; Vishnyakov, G. N.; Moiseev, N. N.; Minaev, V. L.

doi:10.1007/s11018-013-0232-z

Cited by 2 publications

(2 citation statements)

References 2 publications

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“…Generally, this information is obtained by observing the direction that the fringes move when the reference surface is pushed. The lateral resolution is limited by the optical resolution, as with any optical microscope [172], and some improvements are under investigation to overcome the diffraction limit [173,174]. A simple way is to use data acquired during sub-pixel positioning and subsequently deconvolved via standard image enhancement algorithms [173].…”

Section: Microscopic Interferometrymentioning

confidence: 99%

A review of interferometry for geometric measurement

Yang

Zhang

2018

Meas. Sci. Technol.

113

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As high-precision measuring instruments have developed, interferometers have been widely applied in the measurement of lengths and of the shape of surfaces, with nanometer precision. The emergence of the laser is one of the revolutions that has led to a well-defined traceability route to the definition of the meter via interferometry. Another change is the ever-increasing adoption of detector arrays substituting for conventional methods of recording and analyzing interferograms. New applications have also arisen from the adoption of microscopes, optical fibers, chip-level components and diffractive optical elements, developing enhanced analogues of conventional interferometers, which have the advantages of high integration, low noise levels, and complete sets of measuring instruments with a high level of automation. Since the requirements for measurement parameters and the environment are becoming more complex, we expect that the related instruments will play a progressively significant role in the progress of advanced manufacturing processes and quality control. Multi-sensor integrated flexible measurement methods have been proposed to perform measurements with holistic, more accurate and reliable information. However, most of the proposed methods are not intelligent and are highly integrated, providing only specific solutions for given measuring tasks. In this paper, the principles, progress, prospects and development trends of interferometry are reviewed.

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Section: Microscopic Interferometrymentioning

confidence: 99%

A review of interferometry for geometric measurement

Yang

Zhang

2018

Meas. Sci. Technol.

113

View full text Add to dashboard Cite

show abstract

“…Effectiveness of the proposed method was evaluated by the technique described in [17], in which the lateral resolution is measured by half width at half maximum (HWHM) of the derivative height of a nanorelief along the lateral direction in the region of a sharp edge.…”

Section: Measurement Technology and Intelligent Instruments XIImentioning

confidence: 99%