We present an optical interference system nanoprofiler MNP-1 designed for high-precision noncontact measurement of surface relief with subnanometer resolution (root mean square of measured values), based on partial scanning of interference signal. The paper describes the construction of the measurement system with Linnik interferometer and the algorithm for nanorelief surface reconstruction. Experimental measurement results of silicon sample with profile height of surface structure of one interatomic distance obtained by MNP-1 are shown. It was proposed to use an atomically smooth surface as the reference mirror in the interferometer MNP-1 that allowed us to measure monatomic steps of the presented silicon sample. Monatomic steps of 0.31 nm in height on silicon (111) surface were measured with resolution up to 5 pm.
An optical structured illumination of 3D object as a light band method for automatic noncontact wear measurement and defects detection of a contact wire network is presented. The experimental device can extract main technological wire parameters like remaining height with RMS value down to 0.15 mm. Also the cross-sectional area of the wire can be measured with RMS area noise value of 1.5 mm 2 , which is sufficient for a confident decision-making related to the automatic wire wears and defects on railways, tram and trolleybus lines, and similar systems of vehicles electro-supply.
An optical structured light method and an opto-electronic system for automatic noncontact distant measurements of wear and defect detection for a contact wire electro-supply network are presented. The industrial prototype of the system can extract the main technological wire parameters: the remaining height with the rms error down to 0.15 mm and the wire cross-section area with a rms error of 1.5 mm2. This information is sufficient for confident decision making as to safe operation of the contact wire electro-supply network. This method could be applied for automatic wire wear measurement and defect detection for trams, trolleybuses and other electro-supply vehicles.
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