An improved technique is described for the growth of InP by liquid-phase epitaxy. The use of gold-plated reflector tubes in the furnace design has improved the control of layer quality, and background doping levels have been consistently reduced to 3 X 10ZS/cm 3 by replacing polycrystalline InP by PH3(g) as a source of phosphorus. The behavior of the dopants S*~, Ge, S,i,, Te, Zn, Cd, and Bi in InP are discussed and the distribution coefficients "k' are found to be ksa --0.0019, kGe -"-0.005, ksi -"-4, kwe -" 0.27, kzn = 1.14, kcd _~ 0.002, km--0.002 to 0.0002The dopants Sn and Zn were found to be the most suitable for n and p doping for LED fabrication. The Group IV elements yielded n-type material only, although the mobility measurements indicated possible amphoteric behavior for Ge. The Hall mobilities at room temperature Ior the n-type samples show good agreement with theory.z Present address: