2017
DOI: 10.1016/j.mssp.2016.11.042
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The investigation of hydrogen gas sensing properties of SAW gas sensor based on palladium surface modified SnO 2 thin film

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Cited by 62 publications
(34 citation statements)
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“…In the past decade, considerable attention has been paid to SAW gas sensors by utilizing a variety of materials as sensing layers, such as polymers [8][9][10], metal oxides and its nanostructures [11][12][13][14][15] and various carbon-based nanomaterials (e.g.,…”
Section: Introductionmentioning
confidence: 99%
“…In the past decade, considerable attention has been paid to SAW gas sensors by utilizing a variety of materials as sensing layers, such as polymers [8][9][10], metal oxides and its nanostructures [11][12][13][14][15] and various carbon-based nanomaterials (e.g.,…”
Section: Introductionmentioning
confidence: 99%
“…Surface acoustic wave (SAW) sensors have been widely used as hydrogen sensors due to advantages such as high sensitivity, fast response, reliability, and low cost [ 6 , 7 , 8 ]. Detection limits for H 2 gas of 1250 to 2000 ppm (operating temperatures 80–120 °C) [ 9 ], 600 ppm (at 80 °C) [ 10 ] or as low as 200 ppm (at 175 °C) [ 11 ] using SAW sensors have been reported. In SAW sensors, the sensing mechanism is based on the perturbation of the surface acoustic wave propagation by mechanical and/or electrical effects.…”
Section: Introductionmentioning
confidence: 99%
“…A piezoelectric microcantilever in resonating mode, which shifts its resonance frequency due to mass loading, has shown high sensitivity for chemicals and has potential application related to artificial noses (75). For example, piezoelectric substrate modified with SnO2 thin films was used for development hydrogen gas surface acoustic wave (SAW) sensors (76). In this study, enhancement of the sensor performance was proceed by creating bi-layer sensing film made from SnO2 and highly dispersed palladium nanoparticle layers.…”
Section: Conventional and Biosensor Techniques For Indoor Pollutant Dmentioning
confidence: 99%