The influence of surface electric fields on the chemical passivation of Si-SiO2 interfaces after firing

Enhancing Dielectric-Silicon Interfaces Through Surface Electric Fields During Firing

“…We note that this data set has been previously reported in Ref. [44], yet we include here a new analysis and understanding of these results as follows.…”

“…We start by testing our previous findings where surface electric fields can impact the chemical passivation of SiO 2 -SiN x double-layer stacks [44]. The effective lifetime of symmetrically passivated SiO 2 -SiN x samples, pre and post-corona anneal, is illustrated in Fig.…”

“…Our previous work showed that there exists an optimal surface electric field strength before annealing [44]. Increasing the corona concentration beyond a saturation point worsens the lifetime.…”