The influence of process conditions on the phase composition of the LiFePO4 film obtained by the atomic layer method

Chernyaeva, O.Y.; Kyashkin, V. M.; Ivleva, A.Y.; Yrova, V.Y.; Solovyova, E.O.

doi:10.1016/j.poly.2018.09.049

Cited by 8 publications

(4 citation statements)

References 23 publications

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“…The fact that all reports in which a metalorganic precursor is combined with TMP prefer to make use of such a co-reactant pulse prior to the TMP pulse, further highlights the importance of surface hydroxilation. However, although reactions between TMP and a hydroxylized surface show to be possible, they do appear to be rather slow (as described in the work of Chernyaeva et al 58 ). Most processes relying on these reactions with TMP eventually show low P/M ratio's and low growth rates.…”

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confidence: 99%

“…Even more so, multiple reports also show that even though the as-deposited layer is amorphous, a crystalline structure can be obtained with proper post-deposition treatments. 21,29,31,38,39,42,54,56,58,59,62,65,69,79 This is illustrated in figure 13, where amorphous iron phosphate resulting from the plasma-enhanced ALD process (TMP* -O 2 * -TBF) could be transformed into crystalline FePO 4 at the correct temperature and atmosphere (in this case air). This shows that the structure of the currently available phosphates deposited through ALD is already very interesting and that, by carefully selecting the process parameters and/or post-deposition treatment, its structure could be optimised towards different applications.…”

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confidence: 99%

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Atomic layer deposition of metal phosphates

Henderick

Dhara

Werbrouck

et al. 2022

Applied Physics Reviews

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Because of their unique structural, chemical, optical and biological properties, metal phosphate coatings are highly versatile for various applications. Thermodynamically facile and favorable functionalization of phosphate moieties (like orthophosphates, metaphosphates, pyrophosphates, phosphorus-doped oxides...) make them highly sought-after functional materials as well. Being a sequential self-limiting technique, atomic layer deposition has been used for producing high quality conformal coatings with sub-nanometer control. In this review, different atomic layer deposition based strategies used for the deposition of phosphate materials are discussed. The mechanisms underlying those strategies are discussed, highlighting advantages and limitations of specific process chemistries. In a second part, the application of metal phosphates deposited through atomic layer deposition in energy storage and other emerging technologies such as electrocatalysis, biomedical or luminescence applications are summarized. Next to this, perspectives on untangled knowledge gaps and opportunities for future research are also emphasized.1

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confidence: 99%

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confidence: 99%

Atomic layer deposition of metal phosphates

Henderick

Dhara

Werbrouck

et al. 2022

Applied Physics Reviews

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“…Thin films of solid electrolytes, such as Li 7 La 3 Zr 2 O 12 [23], Li 7 La 2.75 Ca 0.25 Zr 1.75 Nb 0.25 O 12 [24], LiPON [25][26][27][28], LiNbO 3 [29][30][31], lithium phosphate (LPO) [15], LiTaO 3 [31][32][33][34], LiAlO x [35,36], lanthanum titanate, lithium lanthanum titanate (LLT) [37], lithium silicates [38], Li 2 O-Al 2 O 3 [39], and Li 3 BO 3 -Li 2 CO 3 [40] were also effectuated by ALD. The possibility of obtaining operable cathode materials composed of LiFePO 4 [41][42][43], LiCoO 2 [44,45], Li x Mn 2 O 4 [46], β-MnO 2 [47], MnO/LiMn 2 O 4 [48], and V 2 O 5 , Li 0.2 V 2 O 5 [49][50][51][52] was also demonstrated.…”

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confidence: 95%

Atomic Layer Deposition of Lithium–Nickel–Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries

et al. 2020

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Lithium nickelate (LiNiO2) and materials based on it are attractive positive electrode materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of atomic layer deposition (ALD) of lithium–nickel–silicon oxide thin films using lithium hexamethyldisilazide (LiHMDS) and bis(cyclopentadienyl) nickel (II) (NiCp2) as precursors and remote oxygen plasma as a counter-reagent are reported. Two approaches were studied: ALD using supercycles and ALD of the multilayered structure of lithium oxide, lithium nickel oxide, and nickel oxides followed by annealing. The prepared films were studied by scanning electron microscopy, spectral ellipsometry, X-ray diffraction, X-ray reflectivity, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, energy-dispersive X-ray spectroscopy, transmission electron microscopy, and selected-area electron diffraction. The pulse ratio of LiHMDS/Ni(Cp)2 precursors in one supercycle ranged from 1/1 to 1/10. Silicon was observed in the deposited films, and after annealing, crystalline Li2SiO3 and Li2Si2O5 were formed at 800 °C. Annealing of the multilayered sample caused the partial formation of LiNiO2. The obtained cathode materials possessed electrochemical activity comparable with the results for other thin-film cathodes.

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“…Numerous studies have addressed the preparation of individual components of thin-film SSLIBs by ALD, such as cathodes [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ], anodes [ 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 ] and solid-state electrolytes [ 50 , 51 , 52 , 53 ]. Using several precursors in the ALD chamber allows the fabrication of all the SSLIB components using ALD equipment [ 12 ].…”

Section: Introductionmentioning

confidence: 99%

Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity

et al. 2021

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Nanostructured metal oxides (MOs) demonstrate good electrochemical properties and are regarded as promising anode materials for high-performance lithium-ion batteries (LIBs). The capacity of nickel-cobalt oxides-based materials is among the highest for binary transition metals oxide (TMOs). In the present paper, we report the investigation of Ni-Co-O (NCO) thin films obtained by atomic layer deposition (ALD) using nickel and cobalt metallocenes in a combination with oxygen plasma. The formation of NCO films with different ratios of Ni and Co was provided by ALD cycles leading to the formation of nickel oxide (a) and cobalt oxide (b) in one supercycle (linear combination of a and b cycles). The film thickness was set by the number of supercycles. The synthesized films had a uniform chemical composition over the depth with an admixture of metallic nickel and carbon up to 4 at.%. All samples were characterized by a single NixCo1-xO phase with a cubic face-centered lattice and a uniform density. The surface of the NCO films was uniform, with rare inclusions of nanoparticles 15–30 nm in diameter. The growth rates of all films on steel were higher than those on silicon substrates, and this difference increased with increasing cobalt concentration in the films. In this paper, we propose a method for processing cyclic voltammetry curves for revealing the influence of individual components (nickel oxide, cobalt oxide and solid electrolyte interface—SEI) on the electrochemical capacity. The initial capacity of NCO films was augmented with an increase of nickel oxide content.

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The influence of process conditions on the phase composition of the LiFePO4 film obtained by the atomic layer method

Cited by 8 publications

References 23 publications

Atomic layer deposition of metal phosphates

Atomic layer deposition of metal phosphates

Atomic Layer Deposition of Lithium–Nickel–Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries

Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity

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