2012
DOI: 10.17146/aij.2006.118
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The Influence of Platinum Dopant on the Characteristics of SnO<sub>2</sub>Thin Film for Gas Sensor Application

Abstract: THE INFLUENCE OF PLATINUM DOPANT ON THE CHARACTERISTICS OF SnO 2 THIN FILM FOR GAS SENSOR APPLICATION.Doping of platinum on tin dioxide (SnO 2 ) thin film for gas sensor application has been carried out using ion implantation techniques. The SnO 2 thin film has been deposited using dc sputtering method at the conditions; operating pressure 5x10 -2 torr, anode-cathode voltage 2.0 kV, substrate temperature 200 0 C and deposition time one hour. While the Pt ion implantation process were carried out at energy 60 k… Show more

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Cited by 4 publications
(6 citation statements)
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“…There is an increase and decrease in the sensitivity indicates the adsorption and desorption phenomenon of the gas. The higher sensitivity may return to the optimum number of inequality on the porosity, largest surface area, larger rate of oxidation and the optimum surface roughness [25]. The sensitivity as well as response time depend on operating temperature since the chemical kinetics in solid-gas reaction is governed by the dependence of temperature [26].…”
Section: Response and Recovery Of The Sensormentioning
confidence: 99%
“…There is an increase and decrease in the sensitivity indicates the adsorption and desorption phenomenon of the gas. The higher sensitivity may return to the optimum number of inequality on the porosity, largest surface area, larger rate of oxidation and the optimum surface roughness [25]. The sensitivity as well as response time depend on operating temperature since the chemical kinetics in solid-gas reaction is governed by the dependence of temperature [26].…”
Section: Response and Recovery Of The Sensormentioning
confidence: 99%
“…[8][9][10] Sensing properties such as sensitivity, selectivity, or working temperature can be improved by several approaches such as modification of the semiconducting metal oxides by different nanostructures. [11][12][13] One of the characteristics of these nanomaterials is their high surface to volume ratio. These nanomaterials also improve the adsorption of CH 4 on the sensor and can increase the sensitivity of the device because of providing more effective collision between analytes and the sensing nanomaterials.…”
Section: Recognitionmentioning
confidence: 99%
“…[11][12][13] For instance, Cabot et al 11 studied the correlation between the catalytic activity and the response of different types of Pt-and Pd-modified SnO 2 sensors to CH 4 as target gas. Sujitno and Sudjatmoko also found the influence of Pt dopant on SnO 2 thin film for significantly reducing the resistance of thin film.…”
Section: Articlementioning
confidence: 99%
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