2001
DOI: 10.1016/s0168-583x(00)00457-2
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The influence of phosphorus and hydrogen ion implantation on the photoluminescence of SiO2 with Si nanoinclusions

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Cited by 32 publications
(15 citation statements)
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“…Other studies of the same system include 150 keV P ion irradiation followed by annealing at 100°C, 649 which was reported to enhance the PL intensity without a significant shift in the emission peak position. A special variation of the theme was postimplanting of Si NCs with 100 keV Si ions ͑the same energy that was used in the synthesis of the crystals͒, thus leading to energy and ion deposition at exactly the same depth as the NC layer.…”
Section: Si and Ge Ncs In Silicamentioning
confidence: 99%
“…Other studies of the same system include 150 keV P ion irradiation followed by annealing at 100°C, 649 which was reported to enhance the PL intensity without a significant shift in the emission peak position. A special variation of the theme was postimplanting of Si NCs with 100 keV Si ions ͑the same energy that was used in the synthesis of the crystals͒, thus leading to energy and ion deposition at exactly the same depth as the NC layer.…”
Section: Si and Ge Ncs In Silicamentioning
confidence: 99%
“…Integration of these two different problems is interesting in terms of modification of electron and optical properties of silicon quantum dots by their doping with shallow impurities. [4][5][6][7][8][9] Investigations of the spatial charge distribution in a quantum dot with impurity, 10 formation of impurity centers inside silicon nanocrystals from the energy point of view, 11 intervalley scattering, 12 hyperfine splitting and optical gap, 13 and screening of the point-charge field [14][15][16][17][18][19][20] have been performed in the past years. No doubt, these investigations contributed to more thorough understanding of the properties of the system nanocrystalline Si + impurity.…”
Section: Introductionmentioning
confidence: 99%
“…With growth of the dose, the F magnitude increases. In [6,7], the model is suggested according to which the IPL enhancement at the phosphorus doping is connected with the action of two mechanisms: the passivation of the disrupted bonds (hence, the decrease of the nonradiative recombination rate) and the appearance of additional electrons in the conductivity band of QD. In our case, unlike [5], the decrease of the IPL at the high P concentration is not observed.…”
Section: Resultsmentioning
confidence: 99%
“…These factors are sensitive to the conditions of the ion implantation (ion energy and dose), the conditions of the annealing (temperature and time), and also the presence of the impurities. In [6,7] was shown that for a fixed annealing temperature T•n -10000 C (the annealing time, t-, = 2 hours), IPL can be adjusted by the choice of a dose. At that, the sizes of NI practically do not vary, and their density grows.…”
Section: Introductionmentioning
confidence: 99%