Abstract:Pumping mechanisms for hydrogen and helium in an ion pump are quite different from the usual mechanisms by which other gases are pumped. Their sputtering yield is much lower and their diffusion higher than for heavier gases. Hence the pumping effect at the cathode plays an important role in pumping these two gases, being comparable with or even larger than the standard pumping at the anode. The effect of the presence of heavier gases on the pumping mechanisms for helium and hydrogen has been investigated for v… Show more
The paper reviews the development of ion pumps, their operating principles and describes particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are discussed.
The paper reviews the development of ion pumps, their operating principles and describes particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are discussed.
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