Sputter-ion pumping

Welch, Kimo M.

doi:10.1016/b978-044450882-9/50024-4

Cited by 4 publications

(4 citation statements)

References 137 publications

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“…As for the NaOH/CFBFA ratio of 0.9, the diffraction intensity seemed unchanged with changing fusion temperature, where 300 °C stood out as its product, LF(300)H24-0.9, was found to have the highest BET surface area (497 m 2 g −1 ), which was comparable to that of commercial type A reported in the literature (450–600 m 2 g −1 ). 46–48…”

Section: Resultsmentioning

confidence: 99%

Synthesis of zeolites from circulated fluidized bed coal fly ash

Feng

May

et al. 2022

Inorg. Chem. Front.

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Section: Resultsmentioning

confidence: 99%

Synthesis of zeolites from circulated fluidized bed coal fly ash

Feng

May

et al. 2022

Inorg. Chem. Front.

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“…UHV can be maintained inside a chamber using a standard ion pump (figure 1), which has Ti flat plate/grid ion collector(s) negatively biased (~ −6000 V) with respect to a cylinder/cylinder array anode, and large permanent magnets that generate high magnetic fields (~0.2 T) within the pump volume [10]. Electrons are emitted from the ion collector(s) through field emission from surface asperities, or from bombardment of pre-existing ions in the inner volume of the chamber.…”

Section: Introductionmentioning

confidence: 99%

An electrostatic ion pump with nanostructured Si field emission electron source and Ti particle collectors for supporting an ultra-high vacuum in miniaturized atom interferometry systems

Basu

Velásquez–García

2016

J. Micromech. Microeng.

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We report a field emission-based, magnetic-less ion pump architecture for helping maintain a high vacuum within a small chamber that is compatible with miniaturized cold-atom interferometry systems. A nanostructured silicon field emitter array, with each nano-sharp tip surrounded by a self-aligned proximal gate electrode, is used to generate a surplus of electrons that cause impact ionization of gas molecules. A two-stage cylindrical electron collector, made of titanium, is used to increase the travel distance of the electrons, augmenting the ionization probability; gas ionization is subsequently followed by gettering of the ions by a negatively charged, annular-shaped titanium electrode. A proof-of-concept pump prototype was characterized using a 25 cm 3 stainless steel vacuum chamber backed up by an external turbomolecular pump, a diaphragm pump, and a standard ion pump. Pumping action was observed with the electrostatic pump operating alone after an initial rapid rise of the chamber pressure due to electron/ion scrubbing. In addition, running the electrostatic pump in combination with the standard ion pump results in a lower vacuum level compared to the vacuum level produced by the standard ion pump acting alone. A proposed reduced-order model accurately predicts the functional dependence of the pressure versus time data and provides a good estimate of the characteristic pumping time constant inferred from the experiments.

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“…More extensive developments have occurred since then with a burst of activity between 1955 and 1975. A cryopump is a capture pump [22] and operates on the principle of trapping gases within a porous material of high surface area (adsorbent) at cryogenic temperatures. The choice of adsorbent in a cryopump defines many of the pump's operating parameters such as pressure, capacity and pumping speed.…”

Section: Introductionmentioning

confidence: 99%

Developing design rules for fabricating microdevices with an integrated micro-sorption pump for vacuum generation: a theoretical study

Barber¹,

Harvey²,

Turney³

et al. 2005

J. Micromech. Microeng.

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Many scientific instruments require a reduced pressure environment for operation. Recent developments of single chip, micro-sized instruments, such as the micro-mass spectrometer, have challenged the conventional vacuum pump's capability to generate this environment. A solution to this challenge would be a device designed to incorporate the vacuum capability within the micro-chip. This requires a change in the conventional approach from designing a modular based vacuum pump to designing a microsystem in conjunction with the vacuum capability, specifically engineered for the micro-instrument's application. The feasibility of integrating a micro-sorption pump within a micro-instrument device is demonstrated in this theoretical study. A model which relates each of the vacuum parameters, mean-free-path, pressure, volume, critical dimension and temperature, is derived for the adsorbent Spherocarb.

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Sputter-ion pumping

Cited by 4 publications

References 137 publications

Synthesis of zeolites from circulated fluidized bed coal fly ash

Synthesis of zeolites from circulated fluidized bed coal fly ash

An electrostatic ion pump with nanostructured Si field emission electron source and Ti particle collectors for supporting an ultra-high vacuum in miniaturized atom interferometry systems

Developing design rules for fabricating microdevices with an integrated micro-sorption pump for vacuum generation: a theoretical study

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