The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

Veijola, Timo; Kuisma, Heikki; Lahdenpera, J.

doi:10.1016/s0924-4247(97)01732-9

Cited by 96 publications

(45 citation statements)

References 14 publications

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“…And the belong to 0.001 to 0.1; the flowage of sensor fingers is slip flow according to [17]. When the fabrication error exists in gap and width of fingers, the coefficients of two damping effects are shown in Table 2.…”

Section: Model Analysismentioning

confidence: 99%

Air Damping Analysis in Comb Microaccelerometer

Zhou

Chen

Peng

et al. 2014

Advances in Mechanical Engineering

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Air damping significantly influences the dynamical characteristics of MEMS accelerometers. Its effects at micro-scale level sharply depend on the structure layouts and size of MEMS devices. The damping phenomenon of comb microaccelerometers is investigated. The air between fixed plate electrodes and movable plate electrodes cannot flow freely and is compressed. The air damping, therefore, exhibits both viscous effects and stiffness effects. The former generates a drag force like that in macromechanical systems, and the damping force is proportional to the velocity of movable electrodes. The latter stiffens the rigidity of structure, and the stiffening level is related to the gap value of capacitors, internal pressure, and temperature. This paper focuses on the dependence of the squeeze film air damping on capacitor gaps. The simulation and experiments indicate that the squeeze film effect is sharply affected by the gap value when the structural dimensions decrease. And the influence of fabrication errors is considered in damping design in comb microaccelerometers.

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Section: Model Analysismentioning

confidence: 99%

Air Damping Analysis in Comb Microaccelerometer

Zhou

Chen

Peng

et al. 2014

Advances in Mechanical Engineering

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“…al. (1995) derived the following approximation that differs by less than 5% from the original equation, Veijola et. al.…”

Section: Equivalent Damping Coefficient For Small and Large Displacementmentioning

confidence: 99%

Dynamic modeling of a silicon bulk-micromachined microaccelerometer

Rodrigues¹,

Góes²,

Passaro³

et al. 2013

Proceeding Series of the Brazilian Society of Computational and Applied Mathematics

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Abstract In this work, we describe dynamic modeling and simulation of a capacitive silicon bulk-micromachined microaccelerometer. The modeling of the mechanical part is done through equivalent stiffness and equivalent damping coefficients analyses using the Euler-Bernoulli equation and the Modified Reynolds equation, respectively. A dynamic model is obtained taking into account the electric force influence between the electrodes. Nonlinear and linear models are compared. The analytical results are compared with numerical results obtained by computational method in both time-domain and frequencydomain and it show a quite good agreement.

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“…If two plates oscillate in a direction perpendicular to their surfaces (Poiseuille flow), the pressure distribution in the gas film can be computed from the generalized Reynolds equation [9,10] employing the effective viscosity [13,14]:…”

Section: Effective Viscosity For Couette and Poiseuille Flowmentioning

confidence: 99%