The Influence of Defect Surface Layers on the Capacitive Properties of MOS Structures

Litovskii, R. N.; Lysenko, V. S.; Nazarov, A. N.; Rudenko, T. E.; Kaschieva, S.; Nedev, N. R.

doi:10.1515/9783112494547-035

June 16 1983

DOI: 10.1515/9783112494547-035

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The Influence of Defect Surface Layers on the Capacitive Properties of MOS Structures

R. N. Litovskii¹,

V. S. Lysenko²,

A. N. Nazarov³

et al.

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The Influence of Defect Surface Layers on the Capacitive Properties of MOS Structures

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