Abstract:Boron-doped nanocrystalline diamond (BDND) films were grown on silicon substrates by hot filament chemical vapor deposition in Ar/H 2 /CH 4 gas mixtures. The boron source was obtained from an additional H 2 line passing through a bubbler containing B 2 O 3 dissolved in methanol with different B/C ratios. The transition from ultrananocrystalline to nanocrystalline diamond films is clearly shown by the addition of boron dopant to the growth gas mixture. The morphology and structure of these films have markedly d… Show more
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