. Lp, 68.55.Nq, 81.05.Ea, 81.15.Gh 20 nm GaNAs epilayers were grown on GaN/sapphire by metalorganic chemical vapor deposition. As growth temperature decreased from 720 to 565 °C, it was found that As concentration was increased from 1.3 × 10 20 and saturated at about 5 -6 × 10 20 cm -3. GaAs-like GaNAs islands were formed on GaN at 530 °C. In case of GaNAs epilayers grown at 565 and 600 °C, GaN-like GaNAs phases were observed by high-resolution X-ray diffraction (XRD) and low angle XRD. By low angle XRD and high-resolution TEM with electron nano-beam diffraction patterns, the FCC-stacked region in wurtzite matrix was clearly observed in thin GaNAs layers. We propose that this structural nonuniformity in GaNAs might be caused by the nonuniform distribution of As concentration.1 Introduction Recently, GaN-related materials have attracted significant attention for their applications to short-wavelength optical devices or high-power/high-temperature electronic devices. The growth of high-quality InGaN epilayers for green light emission is regarded rather difficult due to the requirement of growing high In content InGaN at lower temperatures. As an alternative, arsenic incorporation into GaN is one of the new approaches to longer wavelength device fabrication in nitride materials system since a large band gap bowing can be obtained with addition of a very small amount of As in GaN epilayers. [1-3] However, it was reported that it is very difficult to incorporate As into nitride semiconductor with high crystal quality because of large differences in atomic orbital energy, size, and electronegativity between N and As. [1, 2, 4] As solubility in GaN was as very low as ~1 atomic %, and they showed 2.6 eV emission related not to alloyed GaNAs, but to As-related defect level. The peak intensity was affected by the amount of As supply. [5-8] When more As was incorporated in GaN, it caused the formation of GaAs-like phase in GaNAs layer or GaAs islands on GaN rather than GaNAs phase. [8,9] Moreover, there are some problems in surfaces flatness. Granular surface morphology was obtained from the beginning and the granule size was controlled by the amount of As supply. [8,10]. Therefore, it is very important to know the details of arsenic incorporation behavior in GaN at various growth conditions and its dependence on structural and optical properties of GaNAs.In this work, we characterized the As contents in GaN grown at various growth temperatures. Therefore, we tried to explain As effect on structural property when As was incorporated in thin GaN epilayers.