“…Since tilt angle is related to screw dislocation (b s ¼ h0 0 0 1i) density, the results exhibit a pronounced increase of screw TDs in InN epilayers on elevating growth temperature. The inhomogeneous strain is typically an order of magnitude larger than that in ARTICLE IN PRESS high-quality GaN layers [11], which implies the inferior structural quality of InN grown by MOCVD. In addition, it was found that broadening of the o scan and oÀ2y scan is mainly caused by tilt disorder and inhomogeneous strain, respectively; for instance, a tilt contributes over 95% to the FWHM of (0 0 0 2) rocking curves, while x ?…”