The hardnesses and elastic moduli of pulsed laser deposited multilayer AlN/TiN thin films

Rawdanowicz, T. A.; Godbole, V.P.; Narayan, J.; Sankar, Jag; Sharma, Anand

doi:10.1016/s1359-8368(99)00038-4

Cited by 42 publications

(12 citation statements)

References 21 publications

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“…The hardness values for crystalline AlN deposited on Si (111) are reported to be around 20 GPa [33], and in some cases even in the range 24-25 GPa [15]. For the as-deposited state, all Al-N+Au coatings presented hardness values between 15 and 24 GPa, in good agreement with results from the literature (figure 12a)).…”

Section: Accepted M Manuscriptsupporting

confidence: 86%

“…AlN prefers to grow with closed-packed planes aligned normally to the growth direction [15]. It has been reported that AlN films shows (100) preferred orientation at low nitrogen concentration and, with the increase of this parameter, the films tends out to be more randomly orientated, leading finally to c-axis (002) oriented films with further increasing in the nitrogen concentration [16].…”

Section: Structure and Microstructure Of The Coatingsmentioning

confidence: 99%

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Structural, chemical, optical and mechanical properties of Au doped AlN sputtered coatings

Figueiredo

Vaz

Cunha

et al. 2014

Surface and Coatings Technology

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This paper is focused on the structure, chemical composition, optical and mechanical properties of coatings consisting in an Al-N matrix incorporating different Au contents (up to 2.5% at.). The Au was incorporated in the matrix atomically or in the form of very small nanoparticles (< 1 nm). With the increase in the Au content both the refractive index and the coefficient of extinction were increased. The AlN matrix presented a crystalline wurtzite phase, stable up to 1000°C.With annealing at 400°C the precipitation of XRD detectable Au nanoparticles was possible, originating SPR light absorption. The Al-N+Au coatings exhibited hardness values between 15-24 GPa, with no significant changes after the annealing treatments at low temperatures. These coatings are of interest to the decorative applications.

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Section: Accepted M Manuscriptsupporting

confidence: 86%

Section: Structure and Microstructure Of The Coatingsmentioning

confidence: 99%

Structural, chemical, optical and mechanical properties of Au doped AlN sputtered coatings

Figueiredo

Vaz

Cunha

et al. 2014

Surface and Coatings Technology

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“…The material hardness is depended on many factors such as interatomic bond lengths, the degree of covalent bonding, the temperature, the microstructure and the deformation mechanism [30,31]. As the microstructure and the deformation mechanism were different for TiC, Ti(C,N) single layer coatings and TiN/TiC multilayer coatings, the changes in the hardness of theses coatings with the same crystal structure was predictable.…”

Section: Hardnessmentioning

confidence: 99%

Mechanical Behavior of TiN/TiC-n Multilayer Coatings and Ti(C,N) Multicomponent Coatings Produced by PACVD

2016

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Mechanical properties of multilayer and multicomponent coatings were investigated in this paper. Titanium nitride/titanium carbide (TiN/TiC-n) multilayer and Ti(C,N) multicomponent coatings were prepared on the surface of AISI H13 hot work tool steel by the pulsed-DC plasma assisted chemical vapor deposition (PACVD). The microhardness, the toughness, the wear loss, and the friction coefficient were examined by Vickers hardness test and the pin-on-disk wear test. The optical microscopy was also used to examine worn surfaces and to characterize wear mechanisms. The results obtaiond show that multilayer coatings of TiN/TiC-10 have the lowest friction coefficient (as 0.2) and wear loss, the highest toughness (as 17. 7 MPa m 1 / 2 × ) and microhardness (as 3150 VHN) among those values for multicomponent Ti(C,N) coatings and other multilayer coatings.

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“…The CTEs of Al-diamond composites obtained in the present study are 12.5 and 10.4 Â 10 À6 /K at 40 vol.% diamond and 50 vol.% diamond, respectively. On the other hand, some packaging base materials currently in use are Cu-W, AlN and BeO, and their CTEs are 4-8 Â 10 À6 /K [4][5][6]. To apply Al-diamond composites as a heat spreader, it is necessary to add more diamond powders to such composites.…”

Section: Coefficients Of Thermal Expansionmentioning

confidence: 99%

“…Packaging base materials well known are Cu-W [4], AlN [5], BeO [6] and Al/SiC [7] composites and these all have thermal conductivities, k, near 200 W/mK. The highest thermal conductivity material is good quality diamond, that is available as a naturally occurring material and contains nitrogen less than 100 ppm, and the thermal conductivity, k, is around 2000 W/mK [8].…”

Section: Introductionmentioning

confidence: 99%

Processing of diamond particle dispersed aluminum matrix composites in continuous solid–liquid co-existent state by SPS and their thermal properties

Mizuuchi

Inoue

Agari

et al. 2011

Composites Part B: Engineering

104

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The hardnesses and elastic moduli of pulsed laser deposited multilayer AlN/TiN thin films

Cited by 42 publications

References 21 publications

Structural, chemical, optical and mechanical properties of Au doped AlN sputtered coatings

Structural, chemical, optical and mechanical properties of Au doped AlN sputtered coatings

Mechanical Behavior of TiN/TiC-n Multilayer Coatings and Ti(C,N) Multicomponent Coatings Produced by PACVD

Processing of diamond particle dispersed aluminum matrix composites in continuous solid–liquid co-existent state by SPS and their thermal properties

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