The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological

Shi, Feng; Qiao, Shan; Tian, Ye; Song, Ci; Tie, Guipeng; Jiao, Zhaoyang; Luo, Chen; Zhou, Gang

doi:10.1016/j.ceramint.2022.03.032

Ceramics International

2022

DOI: 10.1016/j.ceramint.2022.03.032

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The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological

Feng Shi

Shan Qiao

Ye Tian

et al.

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Cited by 5 publications

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Research progress of magnetorheological polishing technology: a review

Lu,

Yang,

Lin

et al. 2024

Adv. Manuf.

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As an essential link in ultra-precision machining technology, various new surface polishing technologies and processes have always attracted continuous in-depth research and exploration by researchers. As a new research direction of ultra-precision machining technology, magnetorheological polishing technology has become an important part. The polishing materials and magnetorheological fluids involved in the process of magnetorheological polishing are reviewed. The polishing principle, equipment development, theoretical research and process research of magnetorheological polishing technologies, such as the wheel-type, cluster-type, ball-type, disc-type and other types, derived from the magnetorheological polishing process, are reviewed. The above magnetorheological polishing technologies are analyzed and compared from the perspective of processing accuracy, processing efficiency and application range. The curvature adaptive magnetorheological polishing technology with a circulatory system is proposed to achieve high efficiency and high-quality polishing.

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Research progress of magnetorheological polishing technology: a review

Lu,

Yang,

Lin

et al. 2024

Adv. Manuf.

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Advanced nonlinear rheology magnetorheological finishing: A review

Zhao

ZHANG

Yang

et al. 2024

Chinese Journal of Aeronautics

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A novel specialized material removal rate model considering the synergistic effect of dynamic pressure and shear stress for the permanent-magnet small ball-end magnetorheological polishing

Tian

Liu

Cheng

et al. 2023

Journal of Manufacturing Processes

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The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological

Cited by 5 publications

References 14 publications

Research progress of magnetorheological polishing technology: a review

Research progress of magnetorheological polishing technology: a review

Advanced nonlinear rheology magnetorheological finishing: A review

A novel specialized material removal rate model considering the synergistic effect of dynamic pressure and shear stress for the permanent-magnet small ball-end magnetorheological polishing

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