The fundamentals of the chemical crystallization of diamond from the gas phase

Derjaguin, B.V.; Федосеев, Д. В.; Varshavskaya, I.G.

doi:10.1016/0079-6816(94)90038-8

Cited by 2 publications

(6 citation statements)

References 4 publications

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“…Since the low-pressure synthesis of diamond was reported by Derjaguin and Fedoseev [49] and by Spitsyn et al [50] in HWCVD and by Matsumoto et al [51] in plasma CVD, its underlying principle and process have been intensively studied [52,53]. Although its process has been relatively well established [54,55], its underlying principle has not been clearly understood [52,56].…”

Section: Dominant Formation Of Metastable Diamond Over Stable Graphitementioning

confidence: 99%

“…In the diamond CVD community, however, the 'atomic hydrogen hypothesis', which was suggested by Derjaguin et al [49,74] and is quite different from the conventional approach of metastable phase formation, has been the most popular explanation. According to the atomic hydrogen hypothesis, atomic hydrogen, which is produced by gas activation such as a hot wire or a plasma, etches graphite much faster than diamond and therefore the low-pressure synthesis of metastable diamond is possible.…”

Section: Dominant Formation Of Metastable Diamond Over Stable Graphitementioning

confidence: 99%

“…In order to increase the growth rate of diamond in this cyclic process, Derjaguin and Fedoseev [49] tried to increase the etching rate of graphite using atomic hydrogen. To produce atomic hydrogen, they used hot tungsten wires.…”

Section: Atomic Hydrogen Hypothesis Revisitedmentioning

confidence: 99%

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Charged nanoparticles in thin film and nanostructure growth by chemical vapour deposition

Hwang¹,

Lee²

2010

J. Phys. D: Appl. Phys.

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The critical role of charged nanoclusters and nanoparticles in the growth of thin films and nanostructures by chemical vapour deposition (CVD) is reviewed. Advanced nanoparticle detection techniques have shown that charged gas-phase nuclei tend to be formed under conventional processing conditions of thin films and nanostructures by thermal, hot-wire and plasma CVD. The relation between gas-phase nuclei and thin film and nanostructure growth has not been clearly understood. In this review it will be shown that many films and nanostructures, which have been believed to grow by individual atoms or molecules, actually grow by the building blocks of such charged nuclei. This new growth mechanism was revealed in an attempt to explain many puzzling phenomena involved in the gas-activated diamond CVD process. Therefore, detailed thermodynamic and kinetic analyses will be made to draw the conclusion that the well-known phenomenon of deposition of less stable diamond with simultaneous etching of stable graphite should be an indication of diamond growth exclusively by charged nuclei formed in the gas phase. A similar logic was applied to the phenomenon of simultaneous deposition and etching of silicon, which also leads to the conclusion that silicon films by CVD should grow mainly by the building blocks of charged nuclei. This new mechanism of crystal growth appears to be general in many CVD and some physical vapour deposition (PVD) processes. In plasma CVD, this new mechanism has already been utilized to open a new field of plasma-aided nanofabrication.

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Section: Dominant Formation Of Metastable Diamond Over Stable Graphitementioning

confidence: 99%

Section: Dominant Formation Of Metastable Diamond Over Stable Graphitementioning

confidence: 99%

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Charged nanoparticles in thin film and nanostructure growth by chemical vapour deposition

Hwang¹,

Lee²

2010

J. Phys. D: Appl. Phys.

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“…Since low pressure synthesis of diamond at a relatively high growth rate was demonstrated in the hot filament 41,42 and plasma 43,44 processes, it has been intensively studied. Although the procedure to make diamonds at low pressure is now well established, its underlying principle is not yet understood.…”

Section: Introductionmentioning

confidence: 99%

“…15,[45][46][47] The most popular explanation was the atomic hydrogen hypothesis, 42 which was based on the fact that atomic hydrogen etches graphite much faster than diamond. 41,48 The atomic hydrogen hypothesis states that the atomic hydrogen produced by gas activation, such as hot filament and plasma, etches graphite much faster than diamond and therefore metastable diamond can be formed dominantly over stable graphite at low pressure. A simple thermodynamic analysis shows that this statement contradicts the second law of thermodynamics, because less stable diamond should also etch as long as stable graphite etches.…”

Section: Introductionmentioning

confidence: 99%

Charged clusters in thin film growth

Hwang¹,

Kim²

2004

International Materials Reviews

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A cauliflower structure is a granular film composed of spherical particles similar in size, each with numerous nanoscale nodules on its surface. The structure is produced during certain chemical vapour deposition (CVD) processes for diamond and silicon thin film growth. A classical account in terms of atomic unit deposition fails to explain the growth of such a cauliflower structure, as it requires a gas phase of much higher supersaturation than for onset of diffusion controlled growth. Another interesting and somewhat puzzling phenomenon encountered during a diamond CVD process is that while diamond is depositing on a graphite substrate, carbon atoms in the graphite itself are etched away into the vapour phase; that is, experience evaporation. Again, an elementary kinetic barrier mechanism fails to explain such CVD deposition of a less stable diamond phase combined with simultaneous evaporation of a stable graphite phase. In order to account for such puzzling CVD phenomena and others, a theory of charged clusters has been developed over the past decade as a new paradigm for thin film growth. The theory and its applications are reviewed in this work.

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The fundamentals of the chemical crystallization of diamond from the gas phase

Cited by 2 publications

References 4 publications

Charged nanoparticles in thin film and nanostructure growth by chemical vapour deposition

Charged nanoparticles in thin film and nanostructure growth by chemical vapour deposition

Charged clusters in thin film growth

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