1966
DOI: 10.1021/ic50041a034
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The Fluorosulfuric Acid Solvent System. IV. The Solutes Water and Potassium Nitrate

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Cited by 9 publications
(4 citation statements)
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“…The NMR results that we present in Table IV show that water can simply be added to the EP solution to force the remaining fluorosulfonic acid to supply additional fluorine. Via conductivity measurements, Gillespie et al 22 determined that the equilibrium constant for [5] decreases with increasing temperature. Increasing the temperature also decreases the viscosity of the solution, therefore the free fluorine available for polishing is increased, and subsequently the etch rate, by two mechanisms.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The NMR results that we present in Table IV show that water can simply be added to the EP solution to force the remaining fluorosulfonic acid to supply additional fluorine. Via conductivity measurements, Gillespie et al 22 determined that the equilibrium constant for [5] decreases with increasing temperature. Increasing the temperature also decreases the viscosity of the solution, therefore the free fluorine available for polishing is increased, and subsequently the etch rate, by two mechanisms.…”
Section: Discussionmentioning
confidence: 99%
“…Via conductivity measurements, Gillespie et al [22] determined that the equilibrium constant for (5) decreases with increasing temperature. Increasing the temperature also decreases the viscosity of the solution, therefore the free fluorine available for polishing is increased, and subsequently the etch rate, by two mechanisms.…”
Section: Nmr Spectramentioning
confidence: 99%
“…The presence of fluorosulfonic acid in EP solution is also confirmed with 19 The NMR results presented in Table 4.4 show that water can simply be added to the EP solution to force the remaining fluorosulfonic acid to supply additional fluorine. Via conductivity measurements, Gillespie et al [86] determined that the equilibrium constant for (R16) decreases with increasing temperature. Increasing the temperature also decreases the viscosity of the solution, therefore the free fluorine available for polishing is increased, and subsequently the etch rate, by two mechanisms.…”
Section: Nmr Spectramentioning
confidence: 99%
“…Bei der Herstellung der MeBproben mulJte die groI3e Hydrolyseempfindlichkeit und Ltjsungswarme der wasserfreien Siiure berucksichtigt werden. Das Gleichgewicht der Reaktion H,O+ + FSQ,-= H,SO, + HF liegt dagegen bei tieferen Temperaturen weit auf der linken Seite [7]. Es galt also, die Proben bei moglichst tiefen Temperaturen herzustellen und auch anschlieBend jede unnotige thermische Relastung zu vermeiden.…”
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