12th International Symposium on Power Semiconductor Devices &Amp; ICs. Proceedings (Cat. No.00CH37094)
DOI: 10.1109/ispsd.2000.856842
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The Field Stop IGBT (FS IGBT). A new power device concept with a great improvement potential

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Cited by 235 publications
(78 citation statements)
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“…2) It will be easy to apply the method to devices with similar structures, such as those presented in latest IGBT generations, like field stop [20] and CSTBT [21]), or thyristor-type devices like IGCT [22].…”
Section: Discussionmentioning
confidence: 99%
“…2) It will be easy to apply the method to devices with similar structures, such as those presented in latest IGBT generations, like field stop [20] and CSTBT [21]), or thyristor-type devices like IGCT [22].…”
Section: Discussionmentioning
confidence: 99%
“…This concept is applied to IGBTs in the 600V-6.5kV range, and has been possible by new processes on ultrathin silicon wafers for low voltage IGBTs [39,40]. The combination of a thin n-base with a low-doped field stop (FS) layer results in a drastic reduction of the overall losses [41]. The FS concept is based on using an n-layer with increased doping in front of the panode, and accounts for a trapezoidal electric field distribution in the off-state instead of the triangular one of the NPT structure.…”
Section: Igbtsmentioning
confidence: 99%
“…As shown in Figure 4, the generation of device proceeds only at the moment when the fundamental tradeoff relationship between V on and E off shifts to the closer position from the origin of the graph. In our case, the generation of IGBT proceeds from the planar gate designed by a 3 micro-meter rule to the planar gate of the sub-micron design rule [2], further to the trench gate type [3,9] and CSTBT TM [4,5,7,8], to today's current generation of 600 V class known as the 7th IGBT [6,13] as the LPT type device, LPT type devices are explained in detail in a later part of this paper.…”
Section: Introductionmentioning
confidence: 99%