The fabrication of submicron patterns on curved substrates using a polydimethylsiloxane film mould

Choi, Won Mook; Park, O Ok

doi:10.1088/0957-4484/15/12/013

Cited by 46 publications

(46 citation statements)

References 20 publications

(18 reference statements)

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“…Flexible imprint stamps, made of such as poly(dimethylsiloxane) (PDMS), poly(urethane acrylate) (PUA), and poly(vinyl alcohol) (PVA) polymer was previously reported [7][8][9] Sub-micron to nano-sized patterns can easily be formed by moulding those polymers and they have sufficient mechanical strength for hot embossing process and have sufficient UV transparency for UV imprint process. In this study, various kinds of patterns with sub-100 nm feature size were formed on curved acryl substrate by both UV imprint lithography and hot embossing lithography.…”

Section: Introductionmentioning

confidence: 99%

Formation Process and Electrical Property of IrO₂Thin Films Prepared by Reactive Sputtering

Ishikawa¹,

Abe²,

Kawamura³

et al. 2003

Jpn. J. Appl. Phys.

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As small as 100 nm patterns were successfully transferred onto a non-planar acryl substrate using both UV nanoimprinting and hot embossing techniques. Two different types of flexible imprint stamps, electroformed nickel foil stamp and molded watersoluble poly(vinyl alcohol) (PVA) stamp, were used. 100 nm line and space pattern of Si master was successfully transferred to nickel foil stamp and PVA stamp and their patterns were also transferred to the surface of curved acryl substrate using either UV nanoimprint lithography or hot embossing lithography.

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Section: Introductionmentioning

confidence: 99%

Formation Process and Electrical Property of IrO₂Thin Films Prepared by Reactive Sputtering

Ishikawa¹,

Abe²,

Kawamura³

et al. 2003

Jpn. J. Appl. Phys.

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“…In case of patterning of curved surfaces too, the pattern transfer takes place directly in the solid phase, in contrast to existing reported methods where the liquid is heated beyond its glass transition temperature and the patterning takes place in liquid state. [50][51][52] By way of multiple imprinting as discussed before, we could even create 2-D patterns on PDMS films coated on curved surfaces as shown in Figure 6(d). In this particular case, the film thickness was ∼4.3 m and it was coated on a circular tube having diameter 2 cm.…”

Section: Complex Two Dimensional Patterning With One Dimensional Mastermentioning

confidence: 99%

Adhesive Force Assisted Imprinting of Soft Solid Polymer Films by Flexible Foils

Mukherjee¹,

Sharma²,

Gonuguntla³

et al. 2008

j nanosci nanotechnol

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We report a simple, rapid, room temperature, pressure-less and large area (approximately cm2) imprinting technique for high fidelity patterning of soft solid polymer films and surfaces like cross-linked polydimethylsiloxane (PDMS) and polyacrylamide (PAA) based hydrogels, both on planar and curved surfaces. The key element of the method is the use of patterned thin flexible foils that readily and rapidly attain a conformal contact with soft (shear modulus < 0.1 MPa) solid surfaces because of adhesive interfacial interactions. The conformal contact is established at all length scales by bending of the foil at scales larger than the feature size, in conjunction with the spontaneous elastic deformations of the surface on the scale of the features. For example, we used the protective aluminum foils of commercial data storage discs, both with or without data stored, for micron and sub-micron pattern transfer. The patterns are made permanent by UV-ozone treatment (for PDMS) or by controlled drying (for hydrogels). Interestingly, elastic contact imprinting of very thin (< 300 nm) films results in about 50% miniaturization of the original foil feature sizes. Complex two dimensional patterns could also be formed even by using a simple one dimensional master by multiple imprinting. The technique can be particularly useful for the bulk nano applications requiring routine fabrication of templates, for example, in the study of confined chemistry phenomena, nanofluidics, bio-MEMS, micro-imprinting, optical coatings and controlled dewetting.

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“…For example, PDMS (polydimethylsiloxane) as a stamp material is well-known to provide conformal contact even to curved substrates [8] without external pressure. This property is exploited with capillary force lithography (CFL) [9], where filling of the stamp cavities proceeds under capillary action, only.…”

Section: Introductionmentioning

confidence: 99%

Single-layer versus two-layer stamps for reduced pressure thermal nanoimprint

et al. 2015

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Low-pressure imprint is interesting to avoid stamp deformation, stamp failure as well as polymer recovery. When large-area stamps are prepared with a stepping procedure, low pressure is required to optimize the stitching. However, with low-pressure imprint, conformal contact between stamp and substrate is critical. Admittedly, the imprint pressure required for conformal contact depends on the stamp material and its thickness. To get an idea to which extent the imprint pressure can be reduced with a flexible stamp, we compared different stamp materials and stamp architectures, single-layer stamps and two-layer stamps. The two-layer stamps are replica stamps, where the structures were replicated in a thin layer of OrmoStamp, fixed by a backplane. On the background of plate theory, we deduce the pressure reduction compared to a Si stamp by calculating the respective pressure ratio, independent from geometries. In addition, temperature-induced issues are addressed which are of relevance for a thermal imprint process. These issues are related to the mismatch between the thermal expansion coefficients of the stamp and the substrate, and in case of a two-layer stamp, to the mismatch between the backplane material and the top layer. The latter results in temperatureinduced stamp bending. On the basis of simple analytical calculations, the potential of single-layer stamps and twolayer stamps with respect to thermal imprint at reduced pressure is discussed and guidelines are provided to assess the imprint situation when replica stamps are used for imprint. The results demonstrate the attractiveness of twolayer stamps for reduced pressure nanoimprint, even in a temperature-based process.

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The fabrication of submicron patterns on curved substrates using a polydimethylsiloxane film mould

Cited by 46 publications

References 20 publications

Formation Process and Electrical Property of IrO₂Thin Films Prepared by Reactive Sputtering

Formation Process and Electrical Property of IrO₂Thin Films Prepared by Reactive Sputtering

Adhesive Force Assisted Imprinting of Soft Solid Polymer Films by Flexible Foils

Single-layer versus two-layer stamps for reduced pressure thermal nanoimprint

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The fabrication of submicron patterns on curved substrates using a polydimethylsiloxane film mould

Cited by 46 publications

References 20 publications

Formation Process and Electrical Property of IrO2Thin Films Prepared by Reactive Sputtering

Formation Process and Electrical Property of IrO2Thin Films Prepared by Reactive Sputtering

Adhesive Force Assisted Imprinting of Soft Solid Polymer Films by Flexible Foils

Single-layer versus two-layer stamps for reduced pressure thermal nanoimprint

Contact Info

Product

Resources

About

Formation Process and Electrical Property of IrO₂Thin Films Prepared by Reactive Sputtering

Formation Process and Electrical Property of IrO₂Thin Films Prepared by Reactive Sputtering