The evolution of ferroelectricity and ferromagnetism in epitaxial and freestanding SrTiO3-σ thin films

Han, Yue; Wang, Qixiang; Wang, Jie; Wang, Di; Guo, Jinrui; Shi, Chaoqun; Yan, Shishen; He, Bin; Lü, Weiming

doi:10.1016/j.ceramint.2022.08.293

Cited by 2 publications

(1 citation statement)

References 31 publications

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“…Water soluble layers are good candidates for sacrificial layers due to its sustainability, reliability, and nonaggressive etching (figure 2(a)). Sr 3 Al 2 O 6 (SAO) [21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36] is a complex-oxide that has been widely used as a watersoluble sacrificial layer for several reasons. First and foremost, it is readily dissolved in water.…”

Section: Chemical Lift-offmentioning

confidence: 99%

A review on recent advances in fabricating freestanding single-crystalline complex-oxide membranes and its applications

Park

et al. 2023

Phys. Scr.

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Complex-oxide materials are gaining a tremendous amount of interest in the semiconductor materials and device community as they hold many useful intrinsic physical properties such as ferro/piezoelectricity, pyroelectricity, ferromagnetism, as well as magnetostriction and other properties suitable for energy storage elements. Complex-oxides can also be complemented with conventional semiconductor-based devices or used by themselves to realize state-of-the-art electronic/photonic/quantum information devices. However, because complex-oxide materials have vastly different crystalline structures and lattice constant difference compared to conventional semiconductor devices (such as Si or III-V/III-N materials), integration of complex-oxides onto conventional semiconductor platforms has been difficult. Thus, there has been constant efforts to produce freestanding single-crystalline complex-oxide thin films such that these films can be transferred and integrated together with device platforms based on other materials. This review will provide a comprehensive review on single-crystalline complex-oxide membranes technology developed thus far: how they are synthesized, methods to release them from the substrate, and their outstanding properties and applications.

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