A review on recent advances in fabricating freestanding single-crystalline complex-oxide membranes and its applications

Abstract

Complex-oxide materials are gaining a tremendous amount of interest in the semiconductor materials and device community as they hold many useful intrinsic physical properties such as ferro/piezoelectricity, pyroelectricity, ferromagnetism, as well as magnetostriction and other properties suitable for energy storage elements. Complex-oxides can also be complemented with conventional semiconductor-based devices or used by themselves to realize state-of-the-art electronic/photonic/quantum information devices. However, because complex-oxide materials have vastly different crystalline structures and lattice constant difference compared to conventional semiconductor devices (such as Si or III-V/III-N materials), integration of complex-oxides onto conventional semiconductor platforms has been difficult. Thus, there has been constant efforts to produce freestanding single-crystalline complex-oxide thin films such that these films can be transferred and integrated together with device platforms based on other materials. This review will provide a comprehensive review on single-crystalline complex-oxide membranes technology developed thus far: how they are synthesized, methods to release them from the substrate, and their outstanding properties and applications.

Functionalizing nanophotonic structures with 2D van der Waals materials

“…348 Besides, 2D materials that have a minuscule thickness limit their interaction length with electromagnetic waves, 50 and recent advances on remote epitaxy [371][372][373] and van der Waals epitaxy [374][375][376] also permit various three-dimensional (3D) freestanding nanomembranes (Fig. 4c), 50,375,[377][378][379][380] as well as other 3D layer exfoliation techniques by epitaxial chemical lift-off, mechanical exfoliation or laser lift-off. 68,[381][382][383][384][385][386] These thin films are also made ultrathin with artificially defined van der Waals interfaces for photonic van der Waals integration, 48,50,120 on graphene-covered templates for defect-reduced heteroepitaxy (Fig.…”

Lattice modulation strategies for 2D material assisted epitaxial growth

“…Following this instruction, many studies have achieved remote epitaxy on various material sets, including arsenide, nitrides, perovskite, and II-VI semiconductors [ 41 , 46 , 47 , 51 , 57 – 69 ]. The as-obtained epilayers perform well in the strain status, dislocation density, and heterointerface coupling strength, which is favorable for next-generation optoelectronics and electronics applications [ 70 , 71 ].…”

Heterogeneous integration of high-k complex-oxide gate dielectrics on wide band-gap high-electron-mobility transistors

“…Recent advances in producing ultrathin freestanding single-crystalline membranes have enabled heterogenous integration of dissimilar crystalline materials in a single electrical or photonic device, opening a path towards creation of devices with enhanced performance and functionalities 1 , 2 . The focus of recent studies was mainly on the membrane generation method and a rough demonstration of a prototype device fabricated via heterogeneous integration 3 – 5 .…”