The effects of polarizer ellipticity on ellipsometry measurements

Hunter, W. R.; Eaton, D. H.; Sah, C. T.

doi:10.1016/0039-6028(70)90188-3

Cited by 21 publications

(7 citation statements)

References 10 publications

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“…(17) The term ö appears in (14) owing to that the measurements of all the azimuths in the PSA system use the calibration data obtained in the PA system. By the way, the fraction of Kobayashi's Y error 'concerned with the "optical" sources is equal to ö, in terms of the present work.…”

Section: Psa and Psca Systems Characteristic Polarization Parametersmentioning

confidence: 99%

<title>Universal null polarimeter for crystal optics</title>

Kushnir

Vlokh

1997

SPIE Proceedings

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A universal polarimeter for studying the optical anisotropy of transparent and weakly absorbing crystals is presented. It allows to determine simultaneously birefringence, optical indicatrix rotation, optical activity and linear and circular dichroisms. The method is based on the null-polanmetric measurements of the polarization azimuth and the ellipticity of the light emergent from a sample and takes properly into account the systematic errors related to imperfections of the optical equipment. The origins of the errors are discussed and the working theoretical relations used in the polarimeter are deduced. The measuring and data processing procedures are illustrated with experiments on a sample of ferroelectric triglycine sulphate. The developed technique is compared to the well-known HAUP with the emphasis at adhering the principles of high-accuracy polarimetry.

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Section: Psa and Psca Systems Characteristic Polarization Parametersmentioning

confidence: 99%

<title>Universal null polarimeter for crystal optics</title>

Kushnir

Vlokh

1997

SPIE Proceedings

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“…The discrepancies noted in zone-averaged calibration measurements have been attributed primarily to the effect of beam deviation in the polarizing prisms. 4 ' 5 It has also been shown that beam deviation errors significantly limit the accuracy of conventional alignment techniques. 7 It is not sufficient simply to use an average value of X, as previously suggested," since 0 varies continuously as the polarizer azimuth is varied.…”

Section: 12mentioning

confidence: 99%

“…An additional source of error results from the variation in the position of the beam on the cell windows, the specimen, the compensator, the analyzer, and the detector. Hunter 5 attributes the beam deviation errors that he detects in his measurements to the variation in photomultiplier response as the beam position is changed by beam deviation but gives no indication as to how he isolated the variation in photomultiplier response from the other types of beam deviation error that may be present.…”

Section: 12mentioning

confidence: 99%

“…The tilt angle of the plane of incidence at an arbitrary setting of the polarizer can likewise be determined from Eqs. (5) and (11) in terms of /o, 6, and 0. It has been shown that a tilt in the specimen produces direct errors in the azimuthal angles of all the components.…”

Section: Variation In the Plane Of Incidence And The Angle Of Incmentioning

confidence: 99%

“…First, the variation in 0 produced by beam deviation may alter the azimuthal angles of both the polarizer and analyzer at null; second, due to a misalignment of the axis of rotation with the geometric center of the azimuthal scale of the polarizer, a rotation of the scale by 180° may not actually rotate the azimuth of the polarizer by 1800. The magnitude of the latter source of error varies with polarizer azimuth, 5 and if the distance between the rotational axis and the geometric center is Ax, the maximum eccentricity error is given by (0'/)max = (1 + Ax/r), (14) where 0' is the angle through which the scale is rotated and 0 is the angle indicated by the scale. This error can be significant.…”

Section: Cancellation Of Errors Due To the Angle Ofmentioning

confidence: 99%

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Beam Deviation Errors in Ellipsometric Measurements; an Analysis

1974

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The types of error produced by beam deviation in the optical elements of an ellipsometer are examined. It is shown that there are two types of error that may be significant-systematic errors due to a variation in the plane of incidence and in the angle of incidence at the specimen and errors due to the combined effects of beam displacement and nonuniformities in either the detector response or the optical properties of the specimen, the compensator, the polarizer, the analyzer, or the specimen cell. Analytic expressions for the variation in the plane of incidence and in the angle of incidence are given in terms of parameters that can be determined experimentally. A method by which these parameters can be measured is described. It is shown that the azimuthal variation in the angle of incidence produces fundamental errors in conventional zone averaging techniques because the values of psi and Delta are averaged at different angles of incidence in different zones. Methods of experimentally predetermining when such errors are likely to be significant are discussed, and a procedure that cancels most systematic errors due to beam deviation in each zone is described. The combined effects of beam deviation in the polarizer, the compensator, the cell windows, and the analyzer are considered in several commonly used configurations, and the configurations that minimize beam deviation errors are described.

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Crane

Dillingham

2008

J Mater Sci

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The effects of polarizer ellipticity on ellipsometry measurements

Cited by 21 publications

References 10 publications

<title>Universal null polarimeter for crystal optics</title>

<title>Universal null polarimeter for crystal optics</title>

Beam Deviation Errors in Ellipsometric Measurements; an Analysis

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