The effect of nitrogen pressure on cathodic arc deposited NbN thin films

Cansever, Nurhan; Danışman, Murat; Kazmanlı, Kürşat

doi:10.1016/j.surfcoat.2008.06.158

Cited by 52 publications

(26 citation statements)

References 34 publications

(55 reference statements)

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“…Similarly, NbN based films also have been widely used in the field of microelectronics [1,2]. Due to their high hardness, good toughness, and excellent corrosion resistance, NbN based films are most suitable for using as functional films, especially on the surface of mould and on cutting tools for surface modifications.…”

Section: Introductionmentioning

confidence: 99%

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

et al. 2018

Coatings

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Abstract:In this study, reactive magnetron sputtering was applied for preparing NbCN-Ag films with different Ag additions. Ag contents in the as-deposited NbCN-Ag films were achieved by adjusting Ag target power. The composition, microstructure, mechanical properties, and tribological properties were characterized using energy-dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), high resolution transmission electron microscopy (HRTEM), Raman spectrometry, nano-indentation, and high-temperature sliding wear tests. Results indicated that face-centered cubic (fcc) NbN, hexagonal close-packed (hcp) NbN and fcc Ag, amorphous C and amorphous CN x phase co-existed in the as-deposited NbCN-Ag films. After doping with 2.0 at.% Ag, the hardness and elastic modulus reached a maximum value of 33 GPa and 340 GPa, respectively. Tribological properties were enhanced by adding Ag in NbCN-Ag films at room temperature. When the test temperature rose from 300 to 500 • C, the addition of Ag was found beneficial for the friction properties, showing a lowest friction coefficient of~0.35 for NbCN-12.9 at.% Ag films at 500 • C. This was mainly attributed to the existence of AgO x , NbO x , and AgNbO x lubrication phases that acted as solid lubricants to modify the wear mechanism.

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Section: Introductionmentioning

confidence: 99%

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

et al. 2018

Coatings

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“…Previous researches on NbN film mainly focus on the superconducting properties [4]. NbN film is widely used in industry of cutting tools recently, since its thermal expansion coefficient can match to tool steels well [5].…”

Section: Introductionmentioning

confidence: 99%

Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering

2015

Applied Surface Science

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“…Due to their high critical current density, good mechanical properties and transition temperature between 16 and 17 K, NbN x films could be successfully used in several superconducting microelectronics applications [1]. NbN x thin films have been produced by various deposition techniques including reactive magnetron sputtering [2], ion beam assisted deposition [3], pulsed laser deposition [4] and cathodic arc deposition [5,6]. Only few studies on NbN were emphasized on its mechanical properties.…”

Section: Niobium Nitride Films Have Good Mechanicalmentioning

confidence: 99%

Mechanical and Chemical Characterization of NbN_xCoatings Deposited by ICP Assisted DC Magnetron Sputtering

Jun¹,

Kim²,

Kim³

et al. 2014

Journal of the Korean Society for Heat Treatment

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Niobium nitride coatings have many potential thin film applications due to their chemical inertness, good mechanical properties, temperature stability and superconducting properties. In this study, NbN x coatings were prepared by inductively coupled plasma (ICP) assisted DC magnetron sputtering method on the surface of AISI 304 austenitic stainless steels. Effects of target power were studied on mechanical and chemical properties of the coatings. The coating structure was analyzed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). The coating hardness was measured by micro-knoop hardness tester. The coating thickness was measured using a 3D profiler and wear characteristics were estimated using a ball-on-disk wear tester. The thickness of the NbN 4000 hardness above Nb target power of 300 W. Hexagonal δ'-NbN phase and cubic δ-NbN phase were observed in the coating films and the hardness of the NbN x coatings was higher when these two peaks were mixed. The corrosion resistance increased with the increase of the Nb target power.

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The effect of nitrogen pressure on cathodic arc deposited NbN thin films

Cited by 52 publications

References 34 publications

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering

Mechanical and Chemical Characterization of NbN_xCoatings Deposited by ICP Assisted DC Magnetron Sputtering

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The effect of nitrogen pressure on cathodic arc deposited NbN thin films

Cited by 52 publications

References 34 publications

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

Microstructure and tribological properties of NbN-Ag composite films by reactive magnetron sputtering

Mechanical and Chemical Characterization of NbNxCoatings Deposited by ICP Assisted DC Magnetron Sputtering

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Mechanical and Chemical Characterization of NbN_xCoatings Deposited by ICP Assisted DC Magnetron Sputtering