1998
DOI: 10.1109/55.728901
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The effect of native oxide on thin gate oxide integrity

Abstract: We have studied the effect of native oxide on thin gate oxide integrity. Much improved leakage current of gate oxide can be obtained by in situ desorbing the native oxide using a HFvapor treated and H 2 backed process. Furthermore, extremely sharp interface between oxide and Si is obtained, and good oxide reliability is achieved even under a high current density stress of 11 A/cm 2 and a large charge injection of 7:9 2 10 4 C/cm 2 . The presence of native oxide will increase the interface roughness, gate oxide… Show more

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Cited by 38 publications
(36 citation statements)
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“…The XRD analysis of the tested catalysts showed that the position and shape of the XRD pattern of the catalyst supported on the CNTs were very similar to those of the system supported on the AC, except the features at 2h = 26.1°, 43.1°and 53.5°, which was due to the diffraction of (002), (100) and (004) plane of graphite-like tube-wall of the CNTs [16,18]. However, they were markedly different from those of non-supported Ni 1 Mo 1 K 0.05 system (see Fig.…”
Section: Xrd Analysismentioning
confidence: 76%
See 1 more Smart Citation
“…The XRD analysis of the tested catalysts showed that the position and shape of the XRD pattern of the catalyst supported on the CNTs were very similar to those of the system supported on the AC, except the features at 2h = 26.1°, 43.1°and 53.5°, which was due to the diffraction of (002), (100) and (004) plane of graphite-like tube-wall of the CNTs [16,18]. However, they were markedly different from those of non-supported Ni 1 Mo 1 K 0.05 system (see Fig.…”
Section: Xrd Analysismentioning
confidence: 76%
“…The freshly prepared CNTs were purified through treatment of boiling nitric acid (*8 mol/ L) for 12 h, followed by rinsing with the de-ionized water twice, and then drying at 383 K. In the purified CNTs, contents of the total element-carbon and the graphitized carbon were C99.5 and C90% (mass percentage), as evidenced by elemental analysis and H 2 -TPH (temperatureprogrammed hydrogenation) measurements, respectively. Previous characterization studies [15,16] have demonstrated that those CNTs were ''Herringbone-type'' CNTs, with the outer diameters of 10-50 nm, inner diameters of 3-7 nm, and N 2 -BET surface area of 130 m 2 g -1 .…”
Section: Preparation Of Cntsmentioning
confidence: 99%
“…In the purified MWCNTs, contents of the total carbon and the graphitized carbon were C99.5% and C90% (mass%), as evidenced by elemental analysis and H 2 -TPH measurements, respectively. Previous studies [20][21][22] have shown that this type of MWCNTs was a ''Herringbone-type'' of MWCNTs (symbolized as CNTs(h-type), simplified as CNTs hereafter unless otherwise specified), with the outer diameters of 15-60 nm, inner diameters of 3-8 nm, and N 2 -BET surface area of *120 m 2 g -1 .…”
Section: Catalyst Preparationmentioning
confidence: 99%
“…The resulting mud cake-like solid was dried at 383 K for 10 h and then calcined in N 2 atmosphere at 623 K for 2 h, thus yielding the precursor of the Pd i Ga j -y%(x%Pd/CNTs) catalysts. The three reference systems, i.e., the counterparts doped with the simple CNTs(h-type) or ''parallel-type'' CNTs (noted as ''CNTs(p-type)'') [20][21][22] and the CNT-free host catalyst, were prepared in the similar way. All samples of catalyst precursor were pressed, crushed, and sieved to a size of 40-80 mesh for the activity evaluation.…”
Section: Catalyst Preparationmentioning
confidence: 99%
“…The CNTs used in the present work were a ''Herringbone type'' of multi-walled carbon nanotubes [13,15]. Previous characterization studies demonstrated that this type of CNTs were constructed by a superposition of many graphene layer facets, which were tilted at a certain angle with respect to the axis of the central hollow nanofibre, as if a number of cones were placed one on top of the other [13,15]. Their outer diameters were in the range of 15-50 nm, the inner diameters in 3-7 nm and the N 2 -BET surface area at about 130 m 2 /g.…”
Section: Texture and Properties Of Cntsmentioning
confidence: 99%