The effect of low mobility sputter conditions on thin-film disk tribology

Schulz, Kurt S.; Viswanathan, K.V.; Wall, A.; Bowen, Arneice

doi:10.1109/intmag.1992.696361

Cited by 2 publications

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“…The onset of physical grain seperation is observed in a 622 A Cr-underlayer sample (Fig.6). Such a physically separated structure, with voids along the columnar boundaries, can be induced by the atomic shadowing effect under low mobility sputter conditions [7,8]. In addition to the atomic shadowing effect, residual stress in the substrate may promote a physically separated structure.…”

Section: Resultsmentioning

confidence: 99%

Development of columnar microstructure in magnetron sputter deposited CoPtCr/Cr magnetic thin films

1993

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The present study examined the microstructure of CoPtCr alloy thin films, sputter deposited on Cr-underlayers varying in thic~ness from 25 to 1300 A. The investigation is an extension of work that examined the dependenceof the magnetic and noise characteristics on Cr-underlayer thickness. The cross-sectionaias well as planeview high resolutiontransmission electron micnweopy (HRTEM) of these films revealed that fine Cr-underlayer grains nucleate randomly and grow on the surface of a t " d N i p substrate during the early stage of sputter deposition. The heterogeneously nucleated Cr grains resutt in the formation of columnar grains through competitive growth. The width of columnar grains gradually increased with f h thickness and saturated at a thickness of about 850 A Cr-underlayer films. High resolution electron microscopy of these films showed the onset of physical separation h e e n columnar grains occurred b e e n 250 and 600 A. The present study provides bights into

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Section: Resultsmentioning

confidence: 99%

Development of columnar microstructure in magnetron sputter deposited CoPtCr/Cr magnetic thin films

1993

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Fabrication of low-noise media-a manufacturing perspective

et al. 1993

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Three major methods have emerged for the reduction of media noise in thin-film disks and are rooted in the segregation of the grains in the film structure. Physical grain segregation is achieved by altering the adatom mobility of the sputtering process resulting in physically voided grain structures. Compositional segregation is achieved by sputtering high Cr/Co ratio magnetic alloys at elevated temperatures. Finally, a separation into two or more magnetic layers (multilayers) results in a decoupled structure with improved noise characteristics. All three methods have advantages and drawbacks in relationship to other recording properties, general disk properties, and manufacturability concerns. The optimum disk for a recording system is not necessarily the lowest noise medium, but a disk athat compromises improved noise characteristics with improved recording properties, while allowing for an economic and easily manufacturable process.

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The effect of low mobility sputter conditions on thin-film disk tribology

Cited by 2 publications

References 5 publications

Development of columnar microstructure in magnetron sputter deposited CoPtCr/Cr magnetic thin films

Development of columnar microstructure in magnetron sputter deposited CoPtCr/Cr magnetic thin films

Fabrication of low-noise media-a manufacturing perspective

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