The effect of LFG plasma sputtering power on hardness of carbon thin films on SKD11 steel using target material from battery carbon rods

Purkuncoro, Aladin Eko; Soenoko, Rudy; Santjojo, Dionysius Joseph Djoko Herry; Irawan, Yudy Surya

doi:10.15587/1729-4061.2020.198474

EEJET

2020

DOI: 10.15587/1729-4061.2020.198474

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The effect of LFG plasma sputtering power on hardness of carbon thin films on SKD11 steel using target material from battery carbon rods

Aladin Eko Purkuncoro

Rudy Soenoko

Dionysius Joseph Djoko Herry Santjojo

et al.

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The effect of LFG plasma sputtering power on hardness of carbon thin films on SKD11 steel using target material from battery carbon rods

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References 19 publications

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