The effect of indium oxide (In2O3) dopant on the electrical properties of LiTaO3 thin film-based sensor

Djohan, Nani; Harsono, Budi; Liman, Johansah; Hardhienata, Hendradi; Irzaman, Irzaman

doi:10.1080/00150193.2020.1811031

Cited by 4 publications

(2 citation statements)

References 17 publications

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“…However, considering the unique energy collection characteristics of the piezoelectric materials, they have very important advantages in the development of fast dynamic response, low energy consumption, and selfpowered flexible tactile sensors. The piezoelectric materials commonly used in piezoelectric sensors include lead zirconate titanate (PZT) [52][53][54][55][56] , ZnO [57] , BaTiO 3 [58] , LiTaO 3 [59,60] , Group III-nitride (III-N) materials (AlN and GaN) [61][62][63] , and intrinsic flexible polyvinylidene fluoride (PVDF) [64][65][66] .…”

Section: Piezoelectric Mechanismmentioning

confidence: 99%

Recent progress in flexible tactile sensor systems: from design to application

Zhu¹,

Zhou²,

Zhang³

2021

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With the rapid development of artificial intelligence, human-machine interaction, and healthcare systems, flexible tactile sensors have huge market potentials and research needs, so that both fundamental research and application demonstrations are evolving rapidly to push the potential to reality. In this review, we briefly summarize the recent progress of the flexible tactile sensor system, including the common sensing mechanisms, the important performance evaluation parameters, the device design trend, and the main applications. Moreover, the current device design trend towards flexible tactile sensor systems is discussed, including novel structures for outstanding performance, sensor arrays for large-area information acquisition, multi-mode information acquisition, and integration of tactile sensors with transistors. Various emerging applications enabled with these sensors are also exemplified in this review to show the potentials of the tactile sensors. Finally, we also discuss the technical demands and the future perspectives of flexible tactile sensor systems.

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Section: Piezoelectric Mechanismmentioning

confidence: 99%

Recent progress in flexible tactile sensor systems: from design to application

Zhu¹,

Zhou²,

Zhang³

2021

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“…To obtain high-quality semiconductor devices, the "purity" and "single crystal perfection" of the semiconductor must be considered [18]. This is because, in general, the addition of a small number of impurities affects the charge carrier, thus affecting the components being made [19].…”

Section: Introduction mentioning

confidence: 99%

The Effect of Niobium and Rubidium Doping on the Energy Band Gap of a Lithium Tantalate (LiTaO3) Thin Film

Ismangil¹,

Noor

Winata³

2021

ijp

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Chemical solution deposition (CSD) is a technique for making a film by keeping synthetic arrangements on the outer layer of the substrate. The outcomes show that the band gap energy of the LiTaO3 film is 1 eV. Electrons are more effectively invigorated to the valence band than to the conduction band on the grounds that the energy required is not excessively huge. Niobium-doped LiTaO3 film has a band gap energy of 1.15 eV. A large amount of energy is needed for electrons to be energized from the valence band to the conduction band. The rubidium-doped LiTaO3 film has a band gap energy of 1.30 eV.

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