The effect of H2/C2H2 ratio on the structure and tribological properties of carbon thin films prepared by PBII

Liao, Jiaxuan; Tian, Zhaoming; Xu, Jin; Li, Jin; Yang, Hongcheng

doi:10.1016/j.surfcoat.2006.05.038

Cited by 8 publications

(11 citation statements)

References 35 publications

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“…The following optimized implanting parameters were chosen in terms of our experimental conditions. The working gas of C 2 H 2 and H 2 (H 2 /C 2 H 2 ratio of 0.08) can obtain a high sp 3 /sp 2 ratio [17]; 45 µs pulse length, 80 Hz repetition frequency and 0.8 Pa working gas pressure are able to obtain a steady plasma density of 10 9 cm −3 and thus uniform film compositions; 30 min implanting time may acquire an appropriate film thickness; and 3-50 kV pulse implanting voltage is used to study the effect on tribological properties. Thus the final samples are Si wafers coated with nanometre carbon films prepared at various implanting voltages.…”

Section: Methodsmentioning

confidence: 99%

“…The applied loads of 0.1, 0.5, 1 and 4 N, the reciprocating sliding frequency of 2 Hz and the sliding amplitude of 12 mm are chosen. The tribological properties are expressed with the wear life, the friction coefficient and the wear rate, whose details are given in [17].…”

Section: Methodsmentioning

confidence: 99%

“…It also produces important effects on other structural characteristics such as sputtering, implantation, film morphology, structure compactability and the formation of a film-substrate transition layer. The other implanting parameters such as the implanting time, the working gases and the working gas pressure also have a significant influence on the carbon films [16,17].…”

Section: Introductionmentioning

confidence: 99%

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The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

Liao¹,

Tian²,

Li³

et al. 2007

J. Phys. D: Appl. Phys.

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About 30 nm thick nanometre carbon films have been prepared on Si wafers by plasma-based ion implantation at various implanting voltages. The ball-on-disc sliding friction experiments show that the tribological properties of these carbon films are in good agreement with the corresponding structure characteristics which strongly depend on the implanting voltage. These structure characteristics include the film roughness, the film thickness, the C–Si transition layer between the carbon film and the Si substrate and the sp3/sp2 ratio. As the implanting voltage increases, the roughness and the thickness decrease, the C–Si transition layer thickens and the sp3/sp2 ratio first increases to the maximum value at about 30 kV and then decreases. 3 kV and below correspond to bad tribological properties owing to polymer-like carbon (PLC) film and no C–Si transition layer with poor adhesion to the Si substrate. When the implanting voltage increases to over 3 kV, a C–Si transition layer is gradually formed and thickens with increasing adhesion, and the PLC film is gradually turned into a diamond-like carbon (DLC) film, and hence the tribological properties are gradually improved and reach the best values at 30 kV. 10–50 kV correspond to two orders of increase in wear life, close to zero volume wear rate, but about 0.3 friction coefficient at 0.1 N applied load. With the increase in the applied load, the wear life and the friction coefficient decrease and the wear rate increases. For Si wafers coated with the DLC films at 30 kV, in the range of 0.5–1 N, there is an appropriate value corresponding to the wear life of above 18 000 s, friction coefficient of about 0.1 and wear rate of 10−9 mm3 N−1 m−1 level. Additionally, the wear mechanism is discussed.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

Liao¹,

Tian²,

Li³

et al. 2007

J. Phys. D: Appl. Phys.

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“…Therefore, these films are commonly applied in the protective coatings of cutting tools, magnetic storage disks and biomedical applications [1][2][3]. The methods used to create DLC films include ion beam assisted deposition (IBAD), magnetron sputtering deposition (MSD), chemical vapor deposition (CVD) and plasma-based ion implantation (PBII) [4][5][6][7][8][9][10]. Among these methods, the PBII process is considered as one of the most promising techniques, owing to its ability to uniformly implant and deposit ions into three-dimensional substrates with complex shapes.…”

Section: Introductionmentioning

confidence: 99%

Improvement of Thermal Stability and Tribological Performance of Diamond-Like Carbon Composite Thin Films

Jongwannasiri¹,

Li²,

Watanabe³

2013

MSA

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Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties. However, many limitations exist regarding the use of DLC, for example, its tribological characteristics at high temperature, as well as its limited thermal stability. In this study, silicon/oxygen and silicon/nitrogen co-incorporated diamond-like carbon (Si-O-DLC and SiN -DLC) films are studied, taking into account the thermal stability and tribological performance of these films compared with pure DLC. All the films were prepared on Si wafers, WC-Co materials, and aluminum foils using a plasma-based ion implantation (PBII) technique using acetylene (C 2 H 2), tetramethylsilane (TMS, Si(CH 3) 4), oxygen (O 2) and nitrogen (N 2) as plasma sources. The structure of the films was characterized using Raman spectroscopy. The thermal stability of the films was measured using thermogravimetric and differential thermal analysis (TG-DTA). The friction coefficient of the films was assessed using ball-on-disk friction testing. The results indicate that SiN -DLC films present better thermal stability due to the presence of Si-O networks in the films. The SiN -DLC (23 at.%Si, 8 at.%N) film was affected using thermal annealing in an air atmosphere with increasing temperature until 500˚C. The film can also resist thermal shock by cycling 10 times between the various temperatures and air atmosphere until 500˚C. Further, Si-O-DLC and SiN -DLC films exhibit excellent tribological performance, especially the SiN -DLC (23 at.%Si, 8 at.%N) film, which exhibits excellent tribological performance at 500˚C in an air atmosphere. It is concluded that Si-O-DLC and SiN -DLC films improve upon the thermal stability and tribological performance of DLC.

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“…Dorner-Reisela et al 15 studied the characterisation of nitrogen modified DLC films by changing the C 2 H 2 flow ratio in radio frequency plasma enhanced chemical vapour deposition. Liao et al 16 investigated the effect of H 2 /C 2 H 2 ratio on the structure and tribological properties of carbon thin films prepared by plasma based ion implantation. It has not yet been explored whether enhanced wear corrosion resistance can be achieved through overcoat properties in the IBD process.…”

Section: Introductionmentioning

confidence: 99%

Wear corrosion properties of DLC films with different C₂H₂ gas flows and CN layer of magnetic recording disks

Chen

Tan

2009

Surface Engineering

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The wear corrosion properties of magnetic recording disks which correlate to hardness, lubricant bonded ratio and friction coefficient of ultra thin diamond like carbon films deposited with ion beam hydrogenated carbon and sputtering nitrogenated carbon respectively when, deposited on NiP/Al substrates were investigated. Results show that the ion beam deposition hydrogenated carbon (IBD-CH) films prepared at lower C 2 H 2 gas flowrates or 1 nm sputter nitrogenated carbon (CN) deposited on 2 nm IBD-CH layers, exhibit a higher Raman intensity ratio I d /I g and G peak frequency. The hardness of diamond like carbon films increases with decreasing G peak frequency and intensity ratio I d /I g . The lubricant bonded ratio is dramatically increased from 12 to 38% when a 1?0 nm CN is deposited on a 2?0 nm IBD-CH layer. IBD-CH with 35 sccm C 2 H 2 gas flowrate which shows the lowest weight loss, the lowest friction coefficient and the best wear corrosion resistance because of the optimised lubricant bonded ratio and the highest hardness.

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The effect of H2/C2H2 ratio on the structure and tribological properties of carbon thin films prepared by PBII

Cited by 8 publications

References 35 publications

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

Improvement of Thermal Stability and Tribological Performance of Diamond-Like Carbon Composite Thin Films

Wear corrosion properties of DLC films with different C₂H₂ gas flows and CN layer of magnetic recording disks

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The effect of H2/C2H2 ratio on the structure and tribological properties of carbon thin films prepared by PBII

Cited by 8 publications

References 35 publications

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

The tribological properties of nanometre carbon films prepared by plasma-based ion implantation at various implanting voltages

Improvement of Thermal Stability and Tribological Performance of Diamond-Like Carbon Composite Thin Films

Wear corrosion properties of DLC films with different C2H2 gas flows and CN layer of magnetic recording disks

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Wear corrosion properties of DLC films with different C₂H₂ gas flows and CN layer of magnetic recording disks