Low-Dimensional Materials and Devices 2019 2019
DOI: 10.1117/12.2530454
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The effect of growth temperature and metal-to-chalcogen on the growth of WSe2 by molecular beam epitaxy

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Cited by 7 publications
(8 citation statements)
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“…Another noteworthy observation from the normalized W 4f spectra is the emergence of a sub-stoichiometric (WSe 2-x ) state after the 800 °C anneal. This state is seen as an asymmetry at the low binding energy side for the 800 °C curve, which has also been observed for MBE growths of WSe 2 using low Se:W flux ratios [55]. The spectral deconvolution of the post-800 °C anneal W 4f spectrum is shown in Fig.…”
Section: Hzo Thermal Stability On Wsesupporting
confidence: 69%
“…Another noteworthy observation from the normalized W 4f spectra is the emergence of a sub-stoichiometric (WSe 2-x ) state after the 800 °C anneal. This state is seen as an asymmetry at the low binding energy side for the 800 °C curve, which has also been observed for MBE growths of WSe 2 using low Se:W flux ratios [55]. The spectral deconvolution of the post-800 °C anneal W 4f spectrum is shown in Fig.…”
Section: Hzo Thermal Stability On Wsesupporting
confidence: 69%
“…The transition indicates that a larger grain size of the WSe 2 is obtained for higher growth temperature. The WSe 2 retains the same phase since the line shape is not changed in the XPS measurements 39 in Figure 4e. Figure 4f shows This leads to the following model for understanding the growth quality improvement using 2D intermediate layers.…”
Section: Resultsmentioning
confidence: 87%
“…The transition indicates that a larger grain size of the WSe 2 is obtained for higher growth temperature. The WSe 2 retains the same phase since the line shape is not changed in the XPS measurements in Figure e. Figure f shows the fwhm of the XRD θ–2θ scans of the ZnSe overlayers (all grown at 250 °C) as a function of WSe 2 layer growth temperatures.…”
Section: Resultsmentioning
confidence: 97%
“…Thus, there still exists plenty of room for the enhancement of the crystal quality of these thin films by utilizing appropriate substrates for their growth and by further correlating the unexplored or much less explored growth parameters, for instance, the beam flux of the sources, annealing time, growth temperature, etc. 86,111,115–117…”
Section: Discussionmentioning
confidence: 99%
“…Thus, there still exists plenty of room for the enhancement of the crystal quality of these thin films by utilizing appropriate substrates for their growth and by further correlating the unexplored or much less explored growth parameters, for instance, the beam flux of the sources, annealing time, growth temperature, etc. 86,111,[115][116][117] To date, most of the research in this field is limited to the growth of TMDC thin films and heterostructures. It is high time that focus needs to be given to fabricating MBE-grown TMDC-based devices, which can be promising in various applications such as photodetection, gas sensing, thermoelectrics, photocatalysis, energy generation, photovoltaics, etc.…”
Section: Discussionmentioning
confidence: 99%