The effect of film thickness on the tribomechanical properties of the chrome-gold thin film

Bîrleanu, Corina; Pustan, Marius

doi:10.1109/dtip.2016.7514857

Cited by 4 publications

(13 citation statements)

References 18 publications

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“…The saturation thickness at which the film modulus equalized to that of the bulk value was found to be lower than 200 nm [34,35] in some studies. However, similar to our study, continuous increase of elastic modulus as the thickness exceeded 500 nm was observed in other studies as well [36,37]. The change of elastic modulus in some of these studies was shown to be linearly increasing [37], bi-linear [36], and nonlinear [34,35] as a function of film thickness.…”

Section: Resultssupporting

confidence: 91%

Peridynamic Simulations of Nanoindentation Tests to Determine Elastic Modulus of Polymer Thin Films

Çelik

Öterkuş

Guven

2019

J Peridyn Nonlocal Model

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This study combines atomic force microscope (AFM) nanoindentation tests and peridynamic (PD) simulations to extract the elastic moduli of polystyrene (PS) films with varying thicknesses. AFM nanoindentation tests are applied to relatively hard PS thin films deposited on soft polymer (polydimethylsiloxane (PDMS)) substrates. Linear force versus deformation response was observed in nanoindentation experiments and numerical simulations since the soft PDMS substrate under the stiff PS films allowed bending of thin PS films instead of penetration of AFM tip towards the PS films. The elastic moduli of PS thin films are found to be increasing with increasing film thickness. The validity of both the simulation and experimental results is established by comparison against those previously published in the literature.

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Section: Resultssupporting

confidence: 91%

Peridynamic Simulations of Nanoindentation Tests to Determine Elastic Modulus of Polymer Thin Films

Çelik

Öterkuş

Guven

2019

J Peridyn Nonlocal Model

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“…This was due to the fact that the scale effect on gold is not consistent, as summarized in Table 2 . Although the elastic modulus of a gold thin-film often decreases with reduction of its thickness [ 15 ], studies show that the property is still comparable to the bulk value [ 16 , 17 , 18 ]. In addition, no dependency of the modulus on the film thickness was recognized in certain studies [ 19 , 20 ].…”

Section: Resultsmentioning

confidence: 99%

An Advanced Characterization Method for the Elastic Modulus of Nanoscale Thin-Films Using a High-Frequency Micromechanical Resonator

Kim

2017

Materials

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Nanoscale materials have properties that frequently differ from those of their bulk form due to the scale effect, and therefore a measurement technique that can take account of such material characteristics with high accuracy and sensitivity is required. In the present study, advanced nanomechanical metrology was developed for evaluation of elastic properties of thin-film materials. A 52 nm thick chromium (Cr) film was deposited on a high-speed micromechanical resonator using an e-beam evaporator, and the structure was excited to resonate using an ultrasonic platform. The resonant frequencies for the first and second flexural vibration modes were measured using laser interferometry, and they were compared to analytical estimation from the classical beam theory. Results show that the experimental data are in excellent agreement with the theory, within 1% of the relative error, and a mass sensitivity up to 10.5 Hz/fg was achieved. Thus, the scale effect that reduced the Young’s modulus of Cr by 49.8% compared to its bulk property was correctly recognized by the proposed method.

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“…Birleanu et al [96,102] determined the hardness of the analyzed thin films, incorporating the experimental data in the analytical model of Puch-Cabrera. This model takes into consideration the influence of the indentation size according to Meyer's law.…”

Section: Thin Film Nano-mechanical Propertiesmentioning

confidence: 99%

“…In [10,12,96,102,103,116,117], the procedure for obtaining the friction data consisted of measuring the cantilever lateral deflection while scanning the AFM probe back and-forth normal to the groove in contact with the sample at a setpoint of 10nN. After scanning the thin film with an AFM tip, the trace and retrace profiles were collected for each row of the topographic image and the chosen normal load was applied.…”

Section: Friction Coefficient (Cof)mentioning

confidence: 99%

“…The surface morphology has a significant effect on adherence. The study presented in [116] focuses on determining the influence of RMS roughness on the adhesion using the AFM. The results encompassed in this study bring greater comprehension regarding the roughness influence on adhesion at the nanoscale level.…”

Section: Multi Asperity Contact: the Greenwood And Williamson Modelmentioning

confidence: 99%

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AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

et al. 2021

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Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devices. A great deal of research has been conducted to evaluate the efficiency and reliability of different measurements methods for mechanical properties of MEMS material; nevertheless, the technologies regarding manufacturing and testing MEMS materials are not fully developed. The objectivesof this study are to focus on the review of the mechanical and tribological advantages of thin film and to highlight the experimental results of some thin films to obtain quantitative analyses, the elastic/plastic response and the nanotribological behavior. The slight fluctuation of the results for common thin-film materials is most likely due to the lack of international standardization for MEMS materials and for the methods used to measure their properties.

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The effect of film thickness on the tribomechanical properties of the chrome-gold thin film

Cited by 4 publications

References 18 publications

Peridynamic Simulations of Nanoindentation Tests to Determine Elastic Modulus of Polymer Thin Films

Peridynamic Simulations of Nanoindentation Tests to Determine Elastic Modulus of Polymer Thin Films

An Advanced Characterization Method for the Elastic Modulus of Nanoscale Thin-Films Using a High-Frequency Micromechanical Resonator

AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

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