2012
DOI: 10.1016/j.carbon.2011.08.052
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The effect of downstream plasma treatments on graphene surfaces

Abstract: This paper reports on the effects of growth, transfer and annealing procedures on graphene grown by chemical vapour deposition. A combination of Raman spectroscopy, electrical measurements, atomic force microscopy, and x-ray photoemission spectroscopy allowed for the study of inherent characteristics and electronic structure of graphene films.Contributions from contaminants and surface inhomogeneities such as ripples were also examined. A new cleaning and reconstruction process for graphene, based on plasma tr… Show more

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Cited by 99 publications
(87 citation statements)
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References 63 publications
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“…Details on this are included in the ESI † which accompanies this paper. The plasma treatment process described here has previously been shown to be suitable for the plasma treatment and functionalisation of extremely fragile graphene films 31,32 and has successfully been used in the reduction and N-doping of graphene oxide powder. 33 X-ray Photoelectron Spectroscopy (XPS) was carried out using a monochromated Al Ka source in conjunction with an Omicron EA 125 hemispherical analyser.…”
Section: Methodsmentioning
confidence: 99%
“…Details on this are included in the ESI † which accompanies this paper. The plasma treatment process described here has previously been shown to be suitable for the plasma treatment and functionalisation of extremely fragile graphene films 31,32 and has successfully been used in the reduction and N-doping of graphene oxide powder. 33 X-ray Photoelectron Spectroscopy (XPS) was carried out using a monochromated Al Ka source in conjunction with an Omicron EA 125 hemispherical analyser.…”
Section: Methodsmentioning
confidence: 99%
“…Plasma treatment can also be used as post process cleaning step for CVD grown graphene. 104 Cleaned graphene showed enhanced conductivity and charge career mobility as shown in Figure 13.…”
Section: Nitrogen Functionalizationmentioning
confidence: 98%
“…Furthermore, since single-layer graphene is oneatom thick, any residues from fabrication can significantly influence charge transport and electronic device performance. [11][12][13][14][15][16] Although several studies have reported dry etching procedures for graphene-based devices, [17][18][19][20][21][22][23][24][25] this previous work primarily employed optical microscopy and Raman spectroscopy to determine optimal etching conditions. While these methods provide valuable information, they lack sufficient resolution and/or sensitivity to definitively detect residual graphene and/or etching byproducts at the nanoscale.…”
Section: Manuscriptmentioning
confidence: 99%