Abstract:We use a modified cathodic arc deposition technique, including an electromagnetic coil that introduces a magnetic field in the vicinity of the source, to study its influence on the growth of (Ti0.36Al0.64)N coatings. By increasing the strength of the magnetic field produced by the coil, the cathode arc spots are steered toward the edge of the cathode, and the electrons are guided to an annular anode surrounding the cathode. As a result, the plasma density between the cathode and substrate decreased, which was … Show more
“…At atmospheric pressure, optical emission spectrometry is practically the only method for revealing the elemental composition of the discharge plasma. Therefore, in the case of a vacuum arc [28], studying the dependence of the spectral energy density on the radiation wavelength provides detailed information about the presence in the plasma of both positive ions and neutral atoms [29][30][31][32].…”
Discharges with cathode spots can operate in a wide range of gas pressures. Erosion of the cathode material is an inherent property of such discharges. The erosion products are considered to be ionized atoms and electrically neutral microdroplets. In accordance with this concept, a plasma source based on a pulsed cathodic arc discharge in atmospheric-pressure argon with a current of up to 200 A, a pulse duration of 250 μs, and a pulse repetition rate of 10 Hz was implemented. Using this source, the synthesis of magnesium oxide powder was performed. The chemical composition of the erosion products was determined using the TEM/EDS method and the composition of the gas mixture in which the discharge system operated was evaluated by optical spectrometry. It was shown that particles of the synthesized powder have different morphological features, depending on the nature of the electrical erosion of the cathode material. Micron-sized particles are formed due to the removal of microdroplets from liquid–metal craters on the cathode surface at certain plasma pressures. Submicron particles are produced during the agglomeration of atoms originating from the plasma jets flowing out from cathode spots. These atoms are magnesium ions that are neutralized by collisions with gas particles. The advantages and disadvantages of this synthesis method are discussed in this paper. The reference methods for the powder synthesis of magnesium oxide are compared. The prospects of the studied method from the point of view of its application for obtaining ceramic materials are also evaluated.
“…At atmospheric pressure, optical emission spectrometry is practically the only method for revealing the elemental composition of the discharge plasma. Therefore, in the case of a vacuum arc [28], studying the dependence of the spectral energy density on the radiation wavelength provides detailed information about the presence in the plasma of both positive ions and neutral atoms [29][30][31][32].…”
Discharges with cathode spots can operate in a wide range of gas pressures. Erosion of the cathode material is an inherent property of such discharges. The erosion products are considered to be ionized atoms and electrically neutral microdroplets. In accordance with this concept, a plasma source based on a pulsed cathodic arc discharge in atmospheric-pressure argon with a current of up to 200 A, a pulse duration of 250 μs, and a pulse repetition rate of 10 Hz was implemented. Using this source, the synthesis of magnesium oxide powder was performed. The chemical composition of the erosion products was determined using the TEM/EDS method and the composition of the gas mixture in which the discharge system operated was evaluated by optical spectrometry. It was shown that particles of the synthesized powder have different morphological features, depending on the nature of the electrical erosion of the cathode material. Micron-sized particles are formed due to the removal of microdroplets from liquid–metal craters on the cathode surface at certain plasma pressures. Submicron particles are produced during the agglomeration of atoms originating from the plasma jets flowing out from cathode spots. These atoms are magnesium ions that are neutralized by collisions with gas particles. The advantages and disadvantages of this synthesis method are discussed in this paper. The reference methods for the powder synthesis of magnesium oxide are compared. The prospects of the studied method from the point of view of its application for obtaining ceramic materials are also evaluated.
“…Some potential experimental instruments that can study neutral species in the plasma are massenergy analyzer (MEA, see Chapter 5.1.2.) in RGA mode and optical emission spectroscopy [114,115].…”
Linköping 2023Cover: "Vintersolnedgång", represents different plasma colorations generated by various deposition techniques and parameters in this work. Front is reminiscent of the cathodic arc evaporation plasma with 0 (blue) to 1 (pink) Pa of nitrogen pressure in Paper 1. Back is attributed to the plasma with WC-HIPIMS only (azure) and hybrid WC-HiPIMS/TiC-DCMS co-sputtering (turquoise) in Paper 5. The chroma of cover was down tuned by 40%.
“…Studies have shown that a magnetic field can be used to guide the motion of ions [11][12][13][14][15][16][17]. Magnetic fields were commonly used to control the motion of cathode spots [12][13][14], and were also introduced to guide ion motion and to remove the macro-particles from the arc source [15][16][17]. Therefore, controlling the movement of deposition ions may be beneficial for the deposition of inner surface coating.…”
A simulation of magnetic-field-induced ion motion in vacuum arc deposition for the inner surfaces of a tubular workpiece was performed. An auxiliary magnetic field was set to guide the motion of ions inside a pipe, with different magnetic flux densities and ion emission parameters. The results showed the trajectories, deposition ratio and depth of the ions can be controlled via a magnetic field. Within a certain range, the deposition ratio of the ions increases with magnetic flux density. When the magnetic flux density reached a certain value, both the trajectories and deposition ratio of the ions exhibited an obvious periodicity. The depth at which the ions were deposited decreased as an exponential function of the magnetic flux density and ion emission radius, respectively. With an increase in the emission angle, the deposition depth decreased linearly. A numerical model was proposed to express the distribution of the deposition depth. In addition, the deposition ratio and depth are improved with a magnetic field in an environment with a certain density of neutral gas.
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