1980
DOI: 10.1016/0022-3093(80)90136-2
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The effect of ambient atmosphere in the annealing of indium-tin oxide films

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Cited by 3 publications
(3 citation statements)
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“…Figure 1 shows a plot of estimated and measured absorption coefficient versus wavelength for an ITO film. As seen in this figure, the calculated plot compares well with the measured data of absorption coefficient for ITO films by Steckl and Mohammed [13]. However, the agreement of the experimental data with the classical Drude theory may deviate because of the following reasons.…”
Section: Drudesupporting
confidence: 73%
“…Figure 1 shows a plot of estimated and measured absorption coefficient versus wavelength for an ITO film. As seen in this figure, the calculated plot compares well with the measured data of absorption coefficient for ITO films by Steckl and Mohammed [13]. However, the agreement of the experimental data with the classical Drude theory may deviate because of the following reasons.…”
Section: Drudesupporting
confidence: 73%
“…With further increasing annealing temperature above 400°C, the decomposition reaction Fig.4, it can be seen that the morphology of the film annealed at 400°C with hundreds of nm sized clusters appearing on the surface is quite different from those of the film annealed at lower temperatures. Some metal precipitates on the surface of the ITO film annealed at 500°C in forming gas have also been observed using scanning electron microscopy [6]. It is thus suspected that the nm sized clusters are likely metallic indium.…”
Section: Results and Disscussionsmentioning
confidence: 92%
“…It is often used as a transparent conducting material in many opto-electronic devices, such as the III-V compound devices [1], organic and inorganic light emitting devices, ultraviolet photodetectors. Several methods such as thermal evaporation [2,3], RF and DC sputtering [4][5][6][7], e-beam evaporation [1,[8][9][10],and so on have been employed to deposit ITO films on different substrates. However, the electrical and optical characteristics of ITO films are quite sensitive to the preparation methods and conditions.…”
Section: Introductionmentioning
confidence: 99%