The dynamic behavior of MEMS arch resonators actuated electrically

Ouakad, Hassen M.; Younis, Mohammad I.

doi:10.1016/j.ijnonlinmec.2010.04.005

Cited by 194 publications

(133 citation statements)

References 41 publications

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“…The main problem with this approach is that the distributed electrostatic force comes in an integral form in the resulting ROM equations, and consequently this integral form is not easy to deal analytically due to nonlinearities arising from its denominator. As an attempt to overcome this challenge, some groups [31,32] used Taylor-series expansion procedure, which brings the nonlinearity to the numerator of the electrostatic force and hence simplifies the calculation of nonlinear ROM integrals. Others suggested multiplying the resultant equation of motion by the electrostatic force denominator and hence the evaluation of the integral in the ROM equation will not be problematic anymore [25].…”

Section: Static Analysismentioning

confidence: 99%

Structural Behavior of a Multi-Layer Based Microbeam Actuator

2016

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Abstract:In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed of two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model is considered along with the nonlinear electric actuating force to get the equation of motion governing the structural behavior of the actuator. A reduced-order modeling (ROM) based on the Galerkin expansion technique, while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions, is assumed as a discretization technique of the equations of motion in this investigation. The results showed that the double-microbeam MEMS actuator configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.

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Section: Static Analysismentioning

confidence: 99%

Structural Behavior of a Multi-Layer Based Microbeam Actuator

2016

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“…(8). This choice was based on many reasons: A comparison done in [29] in which we concluded that both approaches using either straight mode shapes or curved mode shapes in the ROM are showing acceptable agreement. The conclusion here is that using the mode shapes of a straight beam is sufficient to yield accurate results for arches and this confirms the approach used in [18] to study the static behavior of MEMS arches under electrostatic loads.…”

Section: The Reduced-order Modelmentioning

confidence: 99%

An Electrostatically Actuated MEMS Arch Band-Pass Filter

Ouakad

2013

Shock and Vibration

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Abstract. This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Galerkin-based reduced-order model when excited near its fundamental and third natural frequencies. Several simulation results are presented demonstrating interesting jumps and snap-through behavior of the arches and their attractive features for uses as band-pass filters, such as their sharp roll-off from pass bands to stop bands and their flat response.

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“…Generally, operating under resonance frequency is a common technique for increasing the displacement amplitudes in vibration of MEMS devices [7]. Resonance vibrations can be induced using a wide range of actuation methods such as electrostatic [8][9][10][11], piezoelectric effect [12,13], and thermos-mechanical [14][15][16][17]. There are benefits, drawbacks, and limitations on using each of these actuation techniques in resonance vibration.…”

Section: Introductionmentioning

confidence: 99%

Resonance vibration of an optical fiber micro-cantilever using electro-thermal actuation

Komeili¹,

Ahrabi²,

Menon³

2017

Math. models, eng.

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Abstract. The resonance excitation of an optical fiber actuated by a conductive wire is studied in this paper. A novel approach based on exciting the micro-cantilever fiber at a location close to its base is proposed for this purpose. Analytical modeling is conducted on the mechanical models of this system in order to predict its behavior. The continuous Euler-Bernoulli beam equation with the effect of surrounding fluid medium is formulated as a boundary value problem. The natural frequencies of the system and its harmonic response are expanded analytically, and results are verified using Finite Element analysis. The obtained analytical solutions are used to draw conclusions on the response of the system and suggestions to optimize its performance are presented. In order to verify the idea in practice, an experimental setup that can closely resemble the system under consideration is made in the laboratory and its response to a periodic input with different frequencies are recorded. Comparison between the results of analytical formulation and experimental observations highlights the effectiveness of suggested technique in resonance vibration of optical fibers.

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The dynamic behavior of MEMS arch resonators actuated electrically

Cited by 194 publications

References 41 publications

Structural Behavior of a Multi-Layer Based Microbeam Actuator

Structural Behavior of a Multi-Layer Based Microbeam Actuator

An Electrostatically Actuated MEMS Arch Band-Pass Filter

Resonance vibration of an optical fiber micro-cantilever using electro-thermal actuation

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