The Direct Writing of Plasmonic Gold Nanostructures by Electron‐Beam‐Induced Deposition

Abstract

Various nanostructures are directly written by electron-beam-induced deposition using dimethyl-gold(III)-acetylacetonate as the precursor gas. After purification, their potential applications include plasmonic devices and metamaterials. Carbon contamination of the as-written structures can be completely removed by low-temperature ozone treatment, leaving polycrystalline pure gold structures (see figure). This treatment reduces the size of the nanostructures but does not substantially alter their functional shape

Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposure

“…In such a way, local functional nanostructures can be formed without multistep processing, which is necessary in common resistbased electron beam lithography. Among the functional materials that have been fabricated using FEBID are ferromagnetic wires [2][3][4], metallic [5], and graphitic material [6] for low-resistance nanocontacts, as well as granular wires for strain sensors [7], magnetic sensors [8], gas sensors [9], and material with photonic/plasmonic functionality [10][11][12][13].…”

Materials and 3D Designs of Helix Nanostructures for Chirality at Optical Frequencies

“…Free standing single metallic helices with microscale geometrical features, obtained by FIBID process, were presented by Matsui et al [95] More recently, K. Höflich et al [98] showed the fabrication of single gold helices with a base diameter of 50 nm and vertical pitch in the hundred nanometer range by FEBID. Even though no optical activity was reported in these works, applications of these nanostructures in plasmonics were envisioned, and the relevant issue of material purification is also discussed.…”

Localized deposition of pure platinum nanostructures

“…The precursor used for Pt deposition is Tetrakis(triuorophosphine)platinum, Pt(PF 3 ) 4 (Strem chemicals), a high vapour pressure liquid at room temperature. Due to the sensitivity of this precursor to air and moisture, it was loaded into a peltier-cooled stainless steel bottle in a dry N 2 environment, and sealed using a manual valve.…”

“…FEBID of Pt has attracted more attention than any other material. Platinum nanostructures are of particular interest for applications such as nanoelectronics (as nanowires for interconnects and contacts [3], nanodots for non-volatile memory devices), plasmonic antennas [4] and catalysis (in biosensors and fuel cells). In all of these applications, the resolution, surface area and purity of the deposited material are critical.…”