The Designing of Magnetic-Driven Micromirror for Portable FTIRs

Wang, Shaoxi; Xuan, Yuan

doi:10.1155/2018/1460582

Cited by 4 publications

(4 citation statements)

References 16 publications

(16 reference statements)

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“…In the past years there are numerous reports on translational micromechanics suited for various optical applications as Fourier transform spectroscopy (FTS), [15][16][17] time-domain optical coherence tomography (TD-OCT) 18 or cavity length tuning, e.g., for cavity ring-down spectroscopy (CRDS) 8 or tunable mode-hop free external cavity quantum cascade lasers. 19 Different drive concepts have been issued to control the position of optical elements, e.g., electrothermal bimorphs, 15, 20-22 magnetic [23][24][25] or piezoelectric drives [26][27][28] and electrostatic comb drives. 17,29 All of them have their individual assets and drawbacks.…”

Section: Various Approachesmentioning

confidence: 99%

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Non-resonant MOEMS mirror for laser cavity-length tuning

Dreyhaupt

Oswald

Grasshoff

et al. 2023

MOEMS and Miniaturized Systems XXII

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High resolution spectroscopy via tunable lasers usually requires CW operation with mode-hop-free wavelength tuning. To suppress mode hopping by laser resonator-length tuning, Fraunhofer IPMS developed a novel electrostatic non-resonant translational micromirror. The combination of this device with a MOEMS grating within an external-cavity MIR QCL results in a miniaturized module that meets the requirements of high-resolution spectroscopy. The translational micromirror features a 5-mm aperture, an arbitrary actuator stroke of up to 120 µm and multiple independent electrostatic actuators to compensate for tip or tilt up to 350 µrad. We compare characterization and FEA simulation data, demonstrating the unique characteristics and the operational capability for a variety of applications.

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Section: Various Approachesmentioning

confidence: 99%

“…22,26 Besides the optical aperture and achievable deflection of the mirror plate, unintentional tilting is a crucial parameter for most of the aforementioned applications. 15,16,24,28…”

Section: Various Approachesmentioning

confidence: 99%

Non-resonant MOEMS mirror for laser cavity-length tuning

Dreyhaupt

Oswald

Grasshoff

et al. 2023

MOEMS and Miniaturized Systems XXII

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“…The development of microelectromechanical systems, MEMS, has found a strong position in various fields of knowledge, opening areas of opportunity for the development of new technological applications. This allows for the generation of new or optimized gyroscopes [1], accelerometers [2], microactuators [3], micropositioners [4], micromirrors [5], microswitches [6], microgrippers [7], microcantilevers [8,9], piezoelectric devices [10], magnetic microactuators [11,12], microgenerators [13][14][15], micropumps [16], and RF-MEMS [17,18], among others.…”

Section: Introductionmentioning

confidence: 99%

Z-Shaped Electrothermal Microgripper Based on Novel Asymmetric Actuator

et al. 2022

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Based on a V-shaped microactuator with a pair of beams, modifications were made to the length and width of a microactuator to observe the effects. A theoretical approach and numerical characterization of the modified microactuator were performed. Its performance was compared to a similar microactuator with equal beam widths, and a V-shaped microactuator. The proposed microactuator, fed at 2 V, compared to the V-shaped actuator, showed a 370.48% increase in force, but a 29.8% decrease in displacement. The equivalent von Mises stress level increased (until 74.2 MPa), but was below the silicon ultimate stress. When the modified microactuator was applied to the proposed microgripper, compared to the case using a V-shaped actuator, the displacement between the jaws increased from 0.85 µm to 4.85 µm, the force from 42.11 mN to 73.61 mN, and the natural frequency from 11.36 kHz to 37.99 kHz; although the temperature increased, on average, from 42 °C up to 73 °C, it is not a critical value for many microobjects. The maximum equivalent von Mises stress was equal to 68.65 MPa. Therefore, it has been demonstrated that the new modified microactuator with damping elements is useful for the proposed microgripper of novel geometry, while a reduced area is maintained.

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“…Various MEMS concepts for optical path-length scanning have been reported, typically targeting an out-of-plane translation with large stroke required for the classical dual-beam Michelson interferometer FTS set-up, consisting of fixed and moving mirrors (here realized by an MOEMS) and an optical beam splitter. For large-stroke out-of-plane translation of the MEMS mirror, different actuation principles have been investigated so far: electrostatic [ 5 , 6 , 7 , 8 ], piezoelectric [ 9 , 10 , 11 ], magnetic [ 12 , 13 , 14 , 15 ], and electrothermal [ 16 , 17 , 18 , 19 , 20 , 21 , 22 ], typically using resonant operation for larger strokes, e.g., [ 7 , 8 , 11 ], but also using quasi-static actuation, e.g., [ 10 , 17 ]. Most of these different MOEMS actuation mechanisms suffer from limitations in spectral resolution due to parasitic effects of MEMS-based path-length modulation: first of all, mirror tilt [ 11 , 17 , 19 ], deformation of the mirror due to dynamically (owing to inertia) or statically (due to mirror suspension or optical coating) induced mechanical stress.…”

Section: Introductionmentioning

confidence: 99%

Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers

et al. 2020

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We present a wafer-level vacuum-packaged (WLVP) translatory micro-electro-mechanical system (MEMS) actuator developed for a compact near-infrared-Fourier transform spectrometer (NIR-FTS) with 800–2500 nm spectral bandwidth and signal-nose-ratio (SNR) > 1000 in the smaller bandwidth range (1200–2500 nm) for 1 s measuring time. Although monolithic, highly miniaturized MEMS NIR-FTSs exist today, we follow a classical optical FT instrumentation using a resonant MEMS mirror of 5 mm diameter with precise out-of-plane translatory oscillation for optical path-length modulation. Compared to highly miniaturized MEMS NIR-FTS, the present concept features higher optical throughput and resolution, as well as mechanical robustness and insensitivity to vibration and mechanical shock, compared to conventional FTS mirror drives. The large-stroke MEMS design uses a fully symmetrical four-pantograph suspension, avoiding problems with tilting and parasitic modes. Due to significant gas damping, a permanent vacuum of ≤3.21 Pa is required. Therefore, an MEMS design with WLVP optimization for the NIR spectral range with minimized static and dynamic mirror deformation of ≤100 nm was developed. For hermetic sealing, glass-frit bonding at elevated process temperatures of 430–440 °C was used to ensure compatibility with a qualified MEMS processes. Finally, a WLVP MEMS with a vacuum pressure of ≤0.15 Pa and Q ≥ 38,600 was realized, resulting in a stroke of 700 µm at 267 Hz for driving at 4 V in parametric resonance. The long-term stability of the 0.2 Pa interior vacuum was successfully tested using a Ne fine-leakage test and resulted in an estimated lifetime of >10 years. This meets the requirements of a compact NIR-FTS.

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The Designing of Magnetic-Driven Micromirror for Portable FTIRs

Cited by 4 publications

References 16 publications

Non-resonant MOEMS mirror for laser cavity-length tuning

Non-resonant MOEMS mirror for laser cavity-length tuning

Z-Shaped Electrothermal Microgripper Based on Novel Asymmetric Actuator

Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers

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