The Design of AT-Cut Multiple-Electrode Quartz Crystal Resonator and the Research of its Oscillation Stability and Force-Frequency Property

Abstract

According to the oscillation characteristics of the quartz crystal resonator and the relationship between its force sensitive property and stress distribution on crystal plate, the single-base multiple-electrode quartz crystal resonator is designed. The oscillation stability of the resonator with this structure is tested by using crystal frequency stability tester. The force-frequency property of the resonators formed by electrodes on different positions of the new structure crystal plate is studied by adding radial force on it. The experimental results show that when the new structure quartz crystal resonator works driven by integrated chip, its oscillation frequency stability can reach 10-8, with the electrode thickness increasing, the oscillation stability of the resonators improves. The force-frequency property of the resonator on the different position of the same crystal plate is different, and the force-frequency coefficient has an obvious difference. The total force-frequency coefficient of the newly designed single-base three-electrode quartz crystal resonator can reach 338.8Hz/N by using mix frequency process.