The design and characterization of a piezo-driven ultra-precision stepping positioner

Gao, Peng; Tan, Hong; Yuan, Zhijun

doi:10.1088/0957-0233/11/2/401

Cited by 17 publications

(7 citation statements)

References 9 publications

(9 reference statements)

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“…THROUGH SSA Nanopositioners could perform a variety of precision machining operations [76], [77] and they might be configured Figure 12: Flowchart of the Hybrid SSA position observer [44].C p is the PEA effective capacitance andx is the PEA's position estimate using the hybrid SSA observer. U v c and…”

Section: Simultaneous Force and Position Estimationmentioning

confidence: 99%

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

Liseli

Agnus

Lutz

et al. 2020

IEEE Trans. Instrum. Meas.

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The industrial sector often employs piezoelectric materials as actuators for a variety of uses, some of which requires a precise positioning while being limited by space and cost factors that impede the insertion of external position and force sensors. Piezoelectric Actuators are characterized by strong nonlinearities (hysteresis and creep), badly damped oscillations and sensitivity to the environment, especially temperature variation, that make the measurement of the position mandatory to guarantee the required precision and repeatability of piezoelectricbased positioning systems operating at the micro and nanoscale. Self-Sensing Actuation techniques allow the implementation of precise positioning control of Piezoelectric Actuators without the hindrance of external position sensors. This paper reviews the different Self-Sensing Actuation techniques used for precise positioning control of Piezoelectric Actuators. The principle of Self-Sensing Actuation is defined by the capability of deriving the physical state of a Piezoelectric Actuator (displacement, perceived force, ¤ ¤ ¤) without the use of external sensors to directly measure thereof, but rather by estimating it from the measurement of less intrusive and cheaper physical signals produced by the Piezoelectric Actuator itself (throughout current, voltage drop, ¤ ¤ ¤). The applicability and constraints of each Self-Sensing Actuation approach are examined in order to help in the determination of the most adequate approach for precise control of Piezoelectric Actuators positioning and handling force control.

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Section: Simultaneous Force and Position Estimationmentioning

confidence: 99%

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

Liseli

Agnus

Lutz

et al. 2020

IEEE Trans. Instrum. Meas.

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“…But the force output is smaller and the speed is not high as compared to conventional motors. The third type is the ultrasonic motor type [7][8]. The motor can normally achieve high speed and high accuracy.…”

Section: Introductionmentioning

confidence: 99%

Robust QFT control of a three-axis nano-positioning stage

Tsai

Luo

2008

2008 IEEE International Symposium on Industrial Electronics

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A novel three-axis nano-positioning device is proposed which consists of an X-Y table and a rotational stage on top of the X-Y table. Each stage is actuated by piezoactuator and the motion is sensed by laser displacement sensors. The simplified model of the stage was derived and the finite element model was developed to analyze the motion of the stage. Then the QFT algorithm was proposed to design robust controllers for the stage. It was found that the rise time of the stage is about 0.1 sec for a 10 um input. The positioning accuracy can achieve is within 0.1um.

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“…However, the maximum speed is lower than a few mm/s in most cases. The inchworm motors 1, [19][20][21][22][23][24][25] and walking drive 13,26 belong to this class. Inchworm motors usually use two clamp piezoelectric actuators and one feed piezoelectric actuator.…”

Section: Introductionmentioning

confidence: 99%

Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

Kang

Lee

Gweon

2007

Review of Scientific Instruments

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Many application areas such as semiconductor manufacture, precision optics alignment, and microbiological cell manipulation require ultraprecision positioning systems with a high positioning resolution and large motion range. This article describes the development of a compact high precision linear piezoelectric stepping positioner for precision alignment of optical elements. The positioner is designed to have a compact and symmetric structure, high positioning resolution, large motion range, high force density, adequate dynamic range, and power-off hold. The positioner is fabricated according to these specifications and performance evaluation tests are carried out. A resolution of 10 nm, speed of 1 mms, push force of 25 N, and stiffness of 10.4 N/microm are attained while maintaining a compact size of 32x42x60 mm(3). The required power consumption is 52.33 W. The test results confirm that the developed positioner could be successfully applied to the precision alignment of optical elements.

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The design and characterization of a piezo-driven ultra-precision stepping positioner

Cited by 17 publications

References 9 publications

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

Robust QFT control of a three-axis nano-positioning stage

Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

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