The Design and Analysis of Piezoresistive Shuriken-Structured Diaphragm Micro-Pressure Sensors

Guan, Taotao; Fu, Yang; Wang, Wei; Huang, Xintang; Jiang, Boyan; Zhang, Dacheng

doi:10.1109/jmems.2016.2628781

Cited by 41 publications

(31 citation statements)

References 15 publications

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“…In order to achieve high sensitivity and small size for the piezoresistive pressure sensors, there have been lots of studies focused on the design, simulation and the manufacturing technology have been performed [6,7]. For example, Kalvesten, E. et al [8] fabricated a thin-film pressure sensor by releasing thermal oxygen sacrificial layer in a cavity with a gap of 3 µm.…”

Section: Of 10mentioning

confidence: 99%

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A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

Song

Zhang

et al. 2020

Sensors

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A miniature piezoresistive pressure sensor fabricated by temporary bonding technology was reported in this paper. The sensing membrane was formed on the device layer of an SOI (Silicon-On-Insulator) wafer, which was bonded to borosilicate glass (Borofloat 33, BF33) wafer for supporting before releasing with Cu-Cu bonding after boron doping and electrode patterning. The handle layer was bonded to another BF33 wafer after thinning and etching. Finally, the substrate BF33 wafer was thinned by chemical mechanical polishing (CMP) to reduce the total device thickness. The copper temporary bonding layer was removed by acid solution after dicing to release the sensing membrane. The chip area of the fabricated pressure sensor was of 1600 μm × 650 μm × 104 μm, and the size of a sensing membrane was of 100 μm × 100 μm × 2 μm. A higher sensitivity of 36 μV/(V∙kPa) in the range of 0–180 kPa was obtained. By further reducing the width, the fabricated miniature pressure sensor could be easily mounted in a medical catheter for the blood pressure measurement.

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Section: Of 10mentioning

confidence: 99%

“…By substituting Formulas (4)- (6) into Formula (3), the expression of sensitivity is obtained as follows:…”

Section: Piezoresistor Designmentioning

confidence: 99%

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

Song

Zhang

et al. 2020

Sensors

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“…15 In 2016, Guan proposed a new type of 0–3 kPa pressure sensor which has high sensitivity and linearity. 16 Tajaddodianfar proposed a homotopy analysis method to derive the analytical solution of the frequency response of the resonator. 17 In 2018, Amir studied the nonlinear vibration of electrostatically driven resonator and analyzed the influence of various factors on its vibration.…”

Section: Introductionmentioning

confidence: 99%

Free vibration for a micro resonant pressure sensor with cross-type resonator

Han

2021

Advances in Mechanical Engineering

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In this paper, a cross resonator pressure sensor is proposed to improve the detection accuracy of capacitor-detecting sensor. Considering electrostatic force and molecular force, the multi-field coupled dynamic equation of the sensor is established. By solving the dynamic equation, the equations for the mode function and the natural frequencies of the resonator are obtained. Using these equations, the natural frequency and mode function of the sensor are given. Changes of natural frequency of sensor with main parameters are studied. Influence of molecular force on the natural frequency is analyzed. Results show that within a considerable range of pressure, the natural frequencies increase approximately linearly with pressure. Under small pressure, small initial distance between resonator and base, and lower order modes, effects of the Van der Waals force on the natural frequencies are quite obvious.

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“…In addition, a beam-membrane dual-island structure was developed by Meng and Zhao, and the sensor showed a sensitivity of 17.339

V/V/Pa and nonlinearity of 2.559% FSS; however, the sensor’s dimensions were 7000 × 7000

[ 17 ]. Recently, a pressure sensor with a shuriken-structured diaphragm was also introduced by Guan et al and showed a sensitivity of 23.6 mV/kPa and a nonlinearity of 0.18% FSS [ 18 ]. In the most recent publication, Tran et al proposed a novel sensor chip structure based on a combination of a cross-beam, a membrane and a peninsula to make the membrane harder and increase the sensor’s sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

Tran

Zhang

Zhu

2018

Sensors

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This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated using the finite element method (FEM). The functions of the relationship between the dimension variables and mechanical performance were determined based on the curve fitting method, which can provide an approach for geometry optimization of the sensor. In addition, the values in the equations were varied to determine the optimal dimensions for the proposed membrane. Then, to further improve the sensitivity of the sensor, a series of rectangular grooves was created at the position of the piezoresistors. The proposed diaphragm was compared to existing diaphragms, and a considerable increase in the sensitivity and a considerable decrease in nonlinearity error could be achieved by using the proposed sensor. The simulation results suggest that the sensor with the PMNBCB structure obtained a high sensitivity of 34.67 mV/kPa and a low nonlinearity error of 0.23% full-scale span (FSS) for the pressure range of 0–5 kPa. The proposed sensor structure is a suitable selection for MEMS piezoresistive pressure sensors.

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The Design and Analysis of Piezoresistive Shuriken-Structured Diaphragm Micro-Pressure Sensors

Cited by 41 publications

References 15 publications

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

Free vibration for a micro resonant pressure sensor with cross-type resonator

Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

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