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This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements. The stresses induced in the piezoresistors and deflection of the membrane were calculated using the finite element method (FEM). The functions of the relationship between the dimension variables and mechanical performance were determined based on the curve fitting method, which can provide an approach for geometry optimization of the sensor. In addition, the values in the equations were varied to determine the optimal dimensions for the proposed membrane. Then, to further improve the sensitivity of the sensor, a series of rectangular grooves was created at the position of the piezoresistors. The proposed diaphragm was compared to existing diaphragms, and a considerable increase in the sensitivity and a considerable decrease in nonlinearity error could be achieved by using the proposed sensor. The simulation results suggest that the sensor with the PMNBCB structure obtained a high sensitivity of 34.67 mV/kPa and a low nonlinearity error of 0.23% full-scale span (FSS) for the pressure range of 0–5 kPa. The proposed sensor structure is a suitable selection for MEMS piezoresistive pressure sensors.

Dispensing and manipulation of small droplets is important in bioassays, chemical analysis and patterning of functional inks. So far, dispensing of small droplets has been achieved by squeezing the liquid out of a small orifice similar in size to the droplets. Here we report that instead of squeezing the liquid out, small droplets can also be dispensed advantageously from large orifices by draining the liquid out of a drop suspended from a nozzle. The droplet volume is adjustable from attolitre to microlitre. More importantly, the method can handle suspensions and liquids with viscosities as high as thousands mPa s markedly increasing the range of applicable liquids for controlled dispensing. Furthermore, the movement of the dispensed droplets is controllable by the direction and the strength of an electric field potentially allowing the use of the droplet for extracting analytes from small sample volume or placing a droplet onto a pre-patterned surface.

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A new level set method for topology optimization of distributed compliant mechanism is presented in this study. By taking two types of mean compliance into consideration, several new objective functions are developed and built in the conventional level set method to avoid generating the de facto hinges in the created mechanisms. Aimed at eliminating the costly reinitialization procedure during the evolution of the level set function, an accelerated level set evolution algorithm is developed by adding an extra energy function, which can force the level set function to close to a signed distance function during the evolution. Two widely studied numerical examples in topology optimization of compliant mechanisms are studied to demonstrate the effectiveness of the proposed method. Figure 3. The schematic of the dummy load method: (a) input unit dummy load, and (b) output unit dummy load.Figure 7. The intermediate designs of the displacement inverter using Q1: (a) step 1, (b) step 50, (c) step 100, (d) step 200, (e) step 350, and (f) step 450.Case 1 in Table I shows that, by setting˛to be quite large andˇto be 0, that is, ignoring the influence of the second type of the mean compliance, a structure that only connects the fixed area with input port A can be obtained. On the contrary, by setting˛to be 0 andˇto be quite large, that is, ignoring the influence of the first type of the mean compliance, a structure that only connects the fixed area with output port B can be obtained. Those are the results that have the structural configuration but cannot accomplish the kinematic performance, that is, the GA is almost 0, and the created mechanism is far beyond the widely recognized one.

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