The deposition of titanium dioxide nanoparticles by means of a hollow cathode plasma jet in dc regime

Perekrestov, Roman; Kudrna, P.; Tichý, M.

doi:10.1088/0963-0252/24/3/035025

Cited by 7 publications

(3 citation statements)

References 26 publications

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“…The various techniques to measure gas temperature include optical emission spectroscopy (OES) [1,[6][7][8][9][10][11][12][13][14][15], infrared thermometry [1,[16][17][18], millimetre wave interferometry [19], Schlieren [1,5], Rayleigh scattering [20,21], thermocouple [1,11,22,23], and fibre optic based thermometry [24,25]. These have been applied to a varying degree in different plasma systems including plasma torch [15,26,27], dielectric barrier discharge [1,7,14,18,19], plasma jet [5,8,9,16,20,24,27,28], gliding arc discharge, [2,17,25] and glow discharge [21]. While some methods offer high accuracy, they are not suitable for continuous measurement due to size and cost and have generally been used to provide a calibrated reference for other techniques, particu...…”

Section: Introductionmentioning

confidence: 99%

Continuous gas temperature measurement of cold plasma jets containing microdroplets, using a focussed spot IR sensor

Hendawy

McQuaid

Mariotti

et al. 2020

Plasma Sources Sci. Technol.

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Controlling gas temperature via continuous monitoring is essential in various plasma applications especially for biomedical treatments and nanomaterial synthesis but traditional techniques have limitations due to low accuracy, high cost or experimental complexity. We demonstrate continuous high-accuracy gas temperature measurements of low-temperature atmospheric pressure plasma jets using a small focal spot infrared sensor directed at the outer quartz wall of the plasma. The impact of heat transfer across the capillary tube was determined using calibration measurements of the inner wall temperature. Measured gas temperatures varied from 25 °C–50 °C, increasing with absorbed power and decreased gas flow. The introduction into the plasma of a stream (∼105 s−1) of microdroplets, in the size range 12 μm–15 μm, led to a reduction in gas temperature of up to 10 °C, for the same absorbed power. This is an important parameter in determining droplet evaporation and its impact on plasma chemistry.

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Section: Introductionmentioning

confidence: 99%

Continuous gas temperature measurement of cold plasma jets containing microdroplets, using a focussed spot IR sensor

Hendawy

McQuaid

Mariotti

et al. 2020

Plasma Sources Sci. Technol.

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“…The outer surface of the nozzle is isolated from the discharge volume by a cylindrical shield made of a lava ceramic that prevents the burning of the discharge in any other part of the nozzle except the hollow cathode. The used plasmajet deposition system is schematically drawn and described in more detail in [28]. For the deposition of iron oxide, the reactive gas O 2 was introduced to the reactor vessel by a lateral port to prevent the hollow-cathode from poisoning.…”

Section: Experimental Arrangementmentioning

confidence: 99%

Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Zanáška¹,

Hubička²,

Čada³

et al. 2017

J. Phys. D: Appl. Phys.

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The floating harmonic probe is a relatively new plasma diagnostic method, which was proposed for applications at conditions when insulating films are deposited on the probe and, consequently, the classical Langmuir probe method fails. In the floating harmonic probe method a purely sinusoidal AC voltage is applied to the probe constructed in a standard manner via a capacitor. From the spectral components of the measured AC probe current waveforms, the electron temperature and the positive ion density can be obtained. In this contribution we present the comparison of the electron temperature and density acquired by the floating harmonic probe method with those obtained by the classical Langmuir probe. The experiments are performed in the flowing DC discharge in argon. In addition, the results from the floating harmonic probe method obtained during deposition of an insulating iron oxide thin film are shown. All the data is complemented by the qualitative discussion.

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“…Inside the nozzle, a very intense discharge is ignited, and the working gas (typically argon) flows into a vacuum chamber, where a so-called plasma jet [16] entrains the plasma. It should be noted that the pressure inside the hollow cathode is up to two orders of magnitude higher than that in the vacuum chamber, leading to the formation of nanoclusters of sputtered particles that are deposited on the substrate, forming nanostructured thin films [17]. Extensive diagnostics of plasma jets have been performed in the past, showing, for example, a different EEDF compared to a magnetron [18].…”

Section: Introductionmentioning

confidence: 99%

Plasma Jet Sputtering as an Efficient Method for the Deposition of Nickel and Cobalt Mixed Oxides on Stainless-Steel Meshes: Application to VOC Oxidation

et al. 2022

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Hollow cathode plasma sputtering is an advantageous method of preparing catalysts in the form of thin oxide films on supports. Such catalysts are particularly suitable for processes such as catalytic total oxidation of volatile organic compounds (VOCs), representing an economically feasible and environmentally friendly method of VOC abatement. Catalysts with Ni:Co molar ratios of 1:4, 1:1, and 4:1 were prepared on stainless-steel meshes and compared with single-component Ni and Co oxide catalysts. The properties of the catalysts were characterized by EDX, SEM, powder XRD, temperature-programmed reduction (H2-TPR), Raman spectroscopy, and XPS. Powder XRD revealed the formation of various crystalline phases that were dependent on molar the Ni:Co ratio. NiO and Co3O4 were identified in the single-component Ni and Co oxide catalysts, whereas Ni-Co mixed oxides with a spinel structure, together with NiO, were found in the catalysts containing both Ni and Co. Raman spectra of the catalysts prepared at high working pressures showed a slightly lower intensity of bands, indicating the presence of smaller oxide particles. The TPR profiles confirmed the improved reducibility of the Ni-Co oxide catalysts compared to the single-component Ni and Co catalysts. Catalytic activity was investigated in the deep oxidation of ethanol and toluene, which were used as model volatile organic compounds. In ethanol oxidation, the activity of sputtered catalysts was up to 16 times higher than that of the commercial Cu-Mn oxide catalyst EnviCat® VOC-1544. The main benefits of the sputtered catalysts are the much lower content of Ni and Co oxides and a negligible effect of internal diffusion. Moreover, the process of plasma jet sputtering can be easily implemented on a large scale.

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The deposition of titanium dioxide nanoparticles by means of a hollow cathode plasma jet in dc regime

Cited by 7 publications

References 26 publications

Continuous gas temperature measurement of cold plasma jets containing microdroplets, using a focussed spot IR sensor

Continuous gas temperature measurement of cold plasma jets containing microdroplets, using a focussed spot IR sensor

Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Plasma Jet Sputtering as an Efficient Method for the Deposition of Nickel and Cobalt Mixed Oxides on Stainless-Steel Meshes: Application to VOC Oxidation

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