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This article presents an experimental study that contributes to the problem of interpretation of cylindrical Langmuir probe data obtained in a non-isothermal low-temperature plasma in magnetic field. A discussion on the influence of positive ion - neutral collisions on the charged particle density estimation is also given and the effect is demonstrated on the experimental data. A Maxwellian electron energy distribution is assumed throughout the present study. The Langmuir probe data are obtained in a cylindrical magnetron discharge in argon at pressures from 1.5 to 6 Pa and magnetic fields between 100 and 500 G. The radially movable Langmuir probe was made of either m or m diameter tungsten wire in order to investigate the effect of the probe dimensions on the estimated plasma density. The electron density is calculated from the electron current at the space potential (used as a reference) and from the OML collisionless theory. The ion density is calculated by using ABR - Chen theory without and with the correction due to the collisions of positive ions in the probe sheath. Also, the recent collisional positive-ion-collection-theory is used for comparison. The resulting numerical values of plasma density are compared over more than one order of magnitude change in the plasma density given by its radial dependence in the cylindrical magnetron discharge. Optical measurements were made in order to quantitatively assess the neutral gas temperature in the discharge and the density of particles in excited states that could induce secondary electron emission from the probe surface and thus apparently enhance the positive-ion density estimated from the probe positive-ion current. The effect of secondary electron emission from the probe surface on the probe data interpretation has been found small compared to the experimental error limits and consequently not substantial for our experimental conditions. In the range of our experimental conditions the ABR - Chen theory with the collisional correction gives the best agreement of the estimated numerical values of ion and electron densities in the whole range of its investigated change. Also from our results it follows that the effect of the magnetic field on the thinner-probe-electron-current at the space potential and hence on the reference-electron-density-estimation is negligible within the experimental uncertainties up to a magnetic field strength of 500 G which was the maximum used in our experimental study.

We report a study of electron saturation current variations at varying probe heating that were found to be closely related to probe wire contamination. The study was performed in three types of low temperature argon plasma -the weakly magnetized plasma of a cylindrical magnetron, the non-magnetized plasma of a double plasma machine and a hollow cathode plasma jet, showing different trends. In the present work the effect of overestimation of the plasma potential by a strongly emitting probe is discussed and experimental data are compared with a theoretical model.

The recombination of H + 3 and H + 5 ions with electrons has been studied in a low-temperature, high-pressure flowing afterglow in a mixture of He-Ar-H 2 . At high H 2 number densities and lower temperatures, H + 5 ions are formed and the electron decay is controlled by their recombination with electrons (rate coefficient α(H + 5 )). At lower H 2 number densities, H + 3 ions dominate the plasma and the decay is controlled by these ions (rate coefficient α(H + 3 )). In the intermediate pressure regime the decay of the afterglow plasma depends on the ratio R =and both rate coefficients. In the experiment the overall effective recombination rate coefficient, α eff , as a function of the H 2 number density was measured. Recombination coefficients α(H + 3 ) and α(H + 5 ) and the equilibrium constant, K C (T ), were determined at several temperatures. The observed pressure and temperature dependences are in good agreement with thermodynamical data.

Abstract. In this contribution we aim at presenting the overview of the work that has been done in expanding the applicability of the probe method to low-temperature plasma at the pressure range when the collisions of charged particles with neutrals start to be important (we call this pressure range medium pressures) and to plasma under the influence of the weak-to-medium magnetic field that is commonly used in plasma enhanced technologies. Most of the discussion is devoted to simple case of a plasma consisting of electrons and of one kind of positive ions. Our review also mostly concerns the cylindrical Langmuir probe. The first part of the article is devoted to discussion on the influence of the positive-ion-neutral collisions on the interpretation of the ion current part of the probe characteristic in order to get the true value of the plasma number density. In the second part one of the theories that take account of this effect is used to assess the influence of the weak magnetic field to the interpretation of the probe data. Finally we discuss the anisotropy of the electron velocity distribution function due to the effect of the magnetic field. The discussion is supported by the new experimental data.