The current distribution in an electrochemical cell. Part VII. Concluding remarks

Abstract

Anew method for the determination of the ability of an electrolyte to distribute uniformly current density in an electrochemical cell is proposed. It is based on the comparison of the current in cells in which the electrode edges touch the cell side walls with the current in cells with different electrode edge ? cell side wall distances. The effects of cell geometry process parameters and current density are discussed and illustrated using the results presented in the previous papers from this series.

Cu Electrodeposition on Resistive Substrates in Alkaline Chemistry: Effect of Current Density and Wafer RPM

“…Whereas the D value decreases with increasing viscosity, 26,27 the value of d shows the opposite behaviour 28 which largely counteracts the effect of an increase in the bulk Cu (II) ion concentration on the limiting current density. 29 Based on these findings, an optimal current density of ca. 1.8 mA/cm 2 has been selected for the wet seed deposition.…”