1984
DOI: 10.1007/bf02872902
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The C−Si (Carbon-Silicon) system

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Cited by 155 publications
(65 citation statements)
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“…For C sub =C total Յ 1.97% the deposited 10 nm layer thickness is close to an expected t crit . Since no misfit dislocations associated with the strain relaxation are observed here or elsewhere, [3][4][5][6][7] the observed transformation of substitutional carbon atoms into interstitials during layer deposition seems to be the mechanism for strain relaxation. These interstitials can further precipitate in the form of three-dimensional ͑3D͒ pyramidal defects ͑Fig.…”
Section: ͑1͒mentioning
confidence: 53%
See 1 more Smart Citation
“…For C sub =C total Յ 1.97% the deposited 10 nm layer thickness is close to an expected t crit . Since no misfit dislocations associated with the strain relaxation are observed here or elsewhere, [3][4][5][6][7] the observed transformation of substitutional carbon atoms into interstitials during layer deposition seems to be the mechanism for strain relaxation. These interstitials can further precipitate in the form of three-dimensional ͑3D͒ pyramidal defects ͑Fig.…”
Section: ͑1͒mentioning
confidence: 53%
“…2 For a Si 1−y C y alloy with carbon atoms incorporated substitutionally, the lattice parameter is reduced with respect to silicon. However, due to the extremely low solid solubility of C in Si under equilibrium conditions, 3 the incorporation of C atoms into substitutional sites is nontrivial and can only be obtained by using far from equilibrium growth conditions. [4][5][6][7] So far, substitutional carbon compositions C sub of a maximum of about 1% have been obtained within typical 100-nm-thick s-Si:C layers grown by different techniques and these are for total carbon concentrations which usually double.…”
mentioning
confidence: 99%
“…As was pointed out by Olesinski and Abbaschian, 14) this silicon carbide layer would have functioned as a growth substrate for diffusing carbon during quenching. As this layer was removed before carbon analysis, the carbon content may have been underestimated.…”
Section: Temperature Dependencymentioning
confidence: 87%
“…The specimen size sharply decreased at 2570 K because the melted specimen was extruded from the mold. Therefore, the eutectic temperature of ZrB 2 -SiC should be 2570 K, significantly lower than the melting points of ZrB 2 (3520 K 1) ) and SiC (2818 K, 24) decomposition temperature). Ordan'yan et al reported the eutectic temperature to be 254330 K by using a pyrometer.…”
Section: Methodsmentioning
confidence: 95%