A lowenergy electron diffraction data acquisition system for very low electron doses based upon a slow scan charge coupled device camera Rev.Irradiating molecularly adsorbed NH 3 with controlled fluences of 50 eV electrons on Pt͑111͒ at 100 K leads to NH 2 , NH, and H species. Temperature programmed desorption shows dihydrogen desorption, confirming electron induced decomposition of ammonia, and a new NH 3 desorption peak ͑210 K͒ attributed to hydrogenation of NH 2 . High resolution electron energy loss spectroscopy identifies NH 2 through two vibrational features at 830 and 1392 cm Ϫ1 that are assigned to rocking and wagging modes, and NH through a single strong stretching feature at 3280 cm Ϫ1 . NH was stable up to 400 K where it dehydrogenated, leaving N on the surface, which was stable up to 700 K. In x-ray photoelectron spectroscopy a N(1s) peak, shifted to lower binding energy, appears after electron irradiation.